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Photonics Research, Volume. 8, Issue 6, 912(2020)

Design and fabrication of a SiN-Si dual-layer optical phased array chip

Pengfei Wang1,2, Guangzhen Luo1,2, Yang Xu3, Yajie Li1,2, Yanmei Su1,2, Jianbin Ma1,2, Ruiting Wang1,2, Zhengxia Yang1,2, Xuliang Zhou1,2, Yejin Zhang1,2, and Jiaoqing Pan1,2、*
Author Affiliations
  • 1Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Beijing R&D Institute, VanJee Technology, Beijing 100193, China
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    CLP Journals

    [1] Lemeng Leng, Zhaobang Zeng, Guihan Wu, Zhongzhi Lin, Xiang Ji, Zhiyuan Shi, Wei Jiang, "Phase calibration for integrated optical phased arrays using artificial neural network with resolved phase ambiguity," Photonics Res. 10, 347 (2022)

    [2] Yingzhi Li, Baisong Chen, Quanxin Na, Qijie Xie, Min Tao, Lanxuan Zhang, Zihao Zhi, Yuxuan Li, Xiaobin Liu, Xianshu Luo, Guoqiang Lo, Fengli Gao, Xueyan Li, Junfeng Song, "Wide-steering-angle high-resolution optical phased array," Photonics Res. 9, 2511 (2021)

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    Pengfei Wang, Guangzhen Luo, Yang Xu, Yajie Li, Yanmei Su, Jianbin Ma, Ruiting Wang, Zhengxia Yang, Xuliang Zhou, Yejin Zhang, Jiaoqing Pan, "Design and fabrication of a SiN-Si dual-layer optical phased array chip," Photonics Res. 8, 912 (2020)

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    Paper Information

    Category: Silicon Photonics

    Received: Jan. 15, 2020

    Accepted: Apr. 2, 2020

    Published Online: May. 19, 2020

    The Author Email: Jiaoqing Pan (jqpan@semi.ac.cn)

    DOI:10.1364/PRJ.387376

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology