Optics and Precision Engineering, Volume. 32, Issue 17, 2591(2024)
Grating interferometric precision nanometric measurement technology
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Xinghui LI, Can CUI. Grating interferometric precision nanometric measurement technology[J]. Optics and Precision Engineering, 2024, 32(17): 2591
Category: Precision Measurement and Sensing
Received: Apr. 17, 2024
Accepted: --
Published Online: Nov. 18, 2024
The Author Email: LI Xinghui (li.xinghui@sz.tsinghua.edu.cn)