Journal of Inorganic Materials, Volume. 35, Issue 9, 1064(2020)

Sputtering Power on the Microstructure and Properties of MgF2 Thin Films Prepared with Magnetron Sputtering

Changjiang ZHAO1,2,3, Chao MA1,2, Juncheng LIU1,2、*, Zhigang LIU3, and Yan CHEN3
Author Affiliations
  • 1School of Materials Science and Engineering, TIANGONG University, Tianjin 300387, China
  • 2State Key Laboratory of Membrane Separation and Membrane Process, Tianjin 300387, China
  • 3Beijing Institute of Spacecraft System Engineering, Beijing 100086, China
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    [11] S MERTIN, L MRAOT, S SANDU C. Nanocrystalline low refractive magnesium fluoride films deposited by reactive magnetron sputtering: optical and structural properties. Adv. Eng. Mater., 17, 1652-1659(2015).

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    Changjiang ZHAO, Chao MA, Juncheng LIU, Zhigang LIU, Yan CHEN. Sputtering Power on the Microstructure and Properties of MgF2 Thin Films Prepared with Magnetron Sputtering[J]. Journal of Inorganic Materials, 2020, 35(9): 1064

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    Paper Information

    Category: RESEARCH LETTERS

    Received: Nov. 6, 2019

    Accepted: --

    Published Online: Mar. 3, 2021

    The Author Email: LIU Juncheng (jchliu@tjpu.edu.cn)

    DOI:10.15541/jim200190565

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