[1] [1] ZHOU ZH Y, WANG X H, YE X Y, et al.. Microelectromechanical Systems［J］. China Journal of Mechanical Engineering, 2002,11(1):163-167. (in Chinese)

[2] [2] TAN Y Y, LU G ZH，ZHAO X, et al.. IP Library-based MEMS design system［J］. Chinese Journal of Sensors and Actuators, 2008,21(2):357-360. (in Chinese)

[3] [3] HUO P F. A Methodology of Multi-port-element Network for MEMS System-level Modeling［D］. Xi’an: Northwestern Polytechnical University, 2004. (in Chinese)

[4] [4] QI J. Modeling and Simulation for Design of Suspended MEMS ［D］. Pittsburgh: Carnegie Mellon University, 2003.

[5] [5] CHRISTOPHER B, EDWARD L, LIU X J, et al.. Heterogeneous Concurrent Modeling and Design in Java(Volume1: Introduction to Ptolemy Ⅱ)［R］. California: University of California at Berkeley, 2007.

[6] [6] CHANG H L,ZHANG Y F,XIE J B, et al.. Integrated behavior simulation and verification for a MEMS vibratory gyroscope using parametric model order reduction ［J］. Journal of MEMS Systems, 2010,19(2):282-293.

[7] [7] KUNDERT K S. The Designer’s Guide to Spice & Spectra［M］. Massachusetts: Kluwer Academic Pubishers, 1995.

[8] [8] ZHU ZH M, ZHANG CH P, YANG Y T, et al.. Behavioral model and simulation of analog circuits using verilog-A［J］. Chinese Journal of Electron Devices, 2003,26(4):396-399. (in Chinese)

[9] [9] Dan Fitz, Patrick Ira Miller. Analog Behavioral Modeling with the Verilog-A Language［M］. Norwell: Kluwer Academic Publishers, 1998.

[10] [10] ZHAO CH D, CHEN M, XU L. Design of micromechanical accelerometer and capacitive sensing circuits［J］. Journal of Chinese Inertial Technology, 1999,7(1):32-35. (in Chinese)