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Optics and Precision Engineering, Volume. 18, Issue 10, 2206(2010)

Co-simulation of MEMS and circuits in Zeni VLG

YUAN Wei-zheng... NIU Hao-bin*, CHANG Hong-long and MA Bing-he |Show fewer author(s)
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    YUAN Wei-zheng, NIU Hao-bin, CHANG Hong-long, MA Bing-he. Co-simulation of MEMS and circuits in Zeni VLG[J]. Optics and Precision Engineering, 2010, 18(10): 2206

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    Paper Information

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    Received: Mar. 8, 2010

    Accepted: --

    Published Online: Feb. 15, 2011

    The Author Email: Hao-bin NIU (nhb1986@gmail.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology