Opto-Electronic Advances, Volume. 4, Issue 3, 200045-1(2021)
Review of micromachined optical accelerometers: from mg to sub-μg
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Qianbo Lu, Yinan Wang, Xiaoxu Wang, Yuan Yao, Xuewen Wang, Wei Huang. Review of micromachined optical accelerometers: from mg to sub-μg[J]. Opto-Electronic Advances, 2021, 4(3): 200045-1
Category: Review
Received: Aug. 17, 2020
Accepted: Sep. 23, 2020
Published Online: Aug. 24, 2021
The Author Email: Lu Qianbo (iamwhuang@nwpu.edu.cn)