Acta Photonica Sinica, Volume. 50, Issue 7, 230(2021)

Studies on the Preparation and Properties of Nanocrystalline ZnSX Thin Films by RF Magnetron Sputtering Technique at Room Temperature

Yang YANG1, Gang LI1, Kewu JING1, Tianqi WANG1, Saiao PENG1, Tingting YAO1, and Shuyong CHEN2
Author Affiliations
  • 1State Key Laboratory of Advanced Technology for Float Glass, Institute of Coating-film Technology, Bengbu, Anhui233000, China
  • 2CNBM Bengbu Design & Research Institute for Glass Industry Co. Ltd, Bengbu, Anhui33018, China
  • show less
    References(23)

    [1] Feng TIAN, Ran BI, Wenyuan ZHAO等. Infrared indium oxide Hf-doped transparent conductive films. Acta Photonica Sinica, 49(2020).

    [2] D CHEN, Jiajie LIANG, Qibing PEI. Flexible and stretchable electrodes for next generation polymer electronics: a review. Science China Chemistry, 59, 659-671(2016).

    [3] P CHELVANATHAN, Y YUSOFF, F HAQUE et al. Growth and characterization of RF-sputtered ZnS thin film deposited at various substrate temperatures for photovoltaic application. Applied Surface Science, 334, 138-144(2015).

    [4] Xiaoheng FANG, Tianyou ZHAI, U K GAUTAM et al. ZnS nanostructures: From synthesis to applications. Progress in Materials Science, 56, 175-287(2011).

    [5] S Y P VENKATA, P PRATHAP, R K T RAMAKRISHNA. Structual, electrical and optical properties of ZnS films deposited by close-spaced evaporation. Applied Surface Science, 253, 2409-2415(2006).

    [6] A LEDONNE, D CAVALCOLI, R A MEREU et al. Study of the physical properties of ZnS thin films deposited by RF sputtering. Materials Science in Semiconductor Processing, 71, 7-11(2017).

    [7] D R KIM, D HWANG et al. Effect of sputtering power on the structure and optical properties of radio frequency sputtered-ZnS thin film. Journal of Nanoscience and Nanotechnology, 17, 5046-5049(2017).

    [8] G E BACON. X-ray and Neutron Diffraction(1966).

    [9] A K SHAHI, B K PANDEY, R K SWARNKAR et al. Surfactant assisted surface studies of zinc sulfide nanoparticals. Applied Surface Science, 257, 9846-9851(2011).

    [10] R JENKINS, R L SNYDER. Introduction to X-ray powder diffractometry(1996).

    [11] L MENTAR, O BAKA, M R KHELLADI et al. Effect of nitrate concentration on the electrochemical growth and properties of ZnO nanostructures. Journal of Materials Science:Materials in Electronics, 26, 1217-1224(2015).

    [12] O BRAFMAN, S S MITRA. Raman effect in Wurtzite and Zinc-Blende-type ZnS single crystals. Physical Review, 171, 931-934(1968).

    [13] S R CHALANA, R J BOSE, R R KRISHNAN et al. Structural phase modification in Cu incorporated nanostructured zinc sulfide thin films. Journal of Physics and Chemistry of Solids, 95, 24-36(2016).

    [14] S R CHALANA, V GANESAN, V P MAHADEVANPILLAI. Surface plasmon resonance in nanostructured Ag incorporated ZnS films. AIP Advance, 5, 107207(2015).

    [15] R D YANG, S TRIPATHY et al. Photoluminescence and micro-Raman scattering in Mn-doped ZnS nanocrystalline semiconductors. Journal of vaccum Science & Technology B, 21, 984-988(2003).

    [16] T DESCHAMPS, C MARTINET, J L BRUNEEL et al. Soda-lime silicate glass under hydrostatic pressure and indentation: a micro-Raman study. Journal of physics-Condensed matter, 23(2011).

    [17] V KUMARA, S K SHARMAA, T P SHARMAA et al. Band gap determination in thick films from reflectance measurements. Optical Materials, 12, 115-119(1999).

    [18] Y NATSUME, H SAKATA. Zinc oxide films prepared by sol-gel spin-coating. Thin Solid Films, 372, 30-36(2000).

    [19] A ALEXANDER, A BORIS. Preparation and study of doped ZnS thin films. Microelectronic Engineering, 170, 39-43(2017).

    [20] L BRUS. Electronic wave functions in semiconductor clusters: experiment and theory. The Journal of Physical Chemistry, 90, 2555-2560(1986).

    [21] B PEJOVA, I GROZDANOV. Three-dimensional confinement effects in semiconducting zinc selenide quantum dots deposited in thin-film form. Materials Chemistry and Physics, 90, 35-46(2005).

    [22] U RICHTER, G DITTMAR, H KETELSEN. Spectraray software manual(2017).

    [23] G KEDAWAT, S SRIVASTAVA, V K JAIN et al. Fabrication of artificially stacked ultrathin ZnS/MgF2 multilayer dielectric optical filters. Applied Materials Interfaces, 5, 4872-4877(2013).

    Tools

    Get Citation

    Copy Citation Text

    Yang YANG, Gang LI, Kewu JING, Tianqi WANG, Saiao PENG, Tingting YAO, Shuyong CHEN. Studies on the Preparation and Properties of Nanocrystalline ZnSX Thin Films by RF Magnetron Sputtering Technique at Room Temperature[J]. Acta Photonica Sinica, 2021, 50(7): 230

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Thin Films

    Received: Nov. 16, 2020

    Accepted: Feb. 4, 2021

    Published Online: Sep. 1, 2021

    The Author Email:

    DOI:10.3788/gzxb20215007.0731002

    Topics