Acta Photonica Sinica, Volume. 50, Issue 7, 230(2021)
Studies on the Preparation and Properties of Nanocrystalline ZnSX Thin Films by RF Magnetron Sputtering Technique at Room Temperature
Figures & Tables(11)
Fig. 1. XRD patterns of ZnS
Fig. 3. Micro-Raman spectra of ZnS
Fig. 4. Transmittance of ZnS
Fig. 5. （
Fig. 8. Refractive index of ZnS
Fig. 9. Extinction coefficient of ZnS
Table 1. Crystal parameters at different sputtering powers
View tableView in ArticleTable 1. Crystal parameters at different sputtering powers
Sputtering power/W Wd111/nm a/nm D111/nm ε/10-3 β 100 0.309 5.36 20.98 0.427 0.382 150 0.306 5.30 32.59 0.286 0.252 200 0.308 5.32 20.99 0.441 0.391
Table 2. EDX elemental analysis of ZnS
X thin films at different sputtering powersView tableView in ArticleTable 2. EDX elemental analysis of ZnS
X thin films at different sputtering powersSputtering power/W W Zn/at.% S/ at.% Zn/S 75 60.17 39.83 1.51 100 57.71 42.29 1.36 150 55.35 44.65 1.23 200 55.74 44.26 1.26
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Yang YANG, Gang LI, Kewu JING, Tianqi WANG, Saiao PENG, Tingting YAO, Shuyong CHEN. Studies on the Preparation and Properties of Nanocrystalline ZnSX Thin Films by RF Magnetron Sputtering Technique at Room Temperature[J]. Acta Photonica Sinica, 2021, 50(7): 230
Paper Information
Category: Thin Films
Received: Nov. 16, 2020
Accepted: Feb. 4, 2021
Published Online: Sep. 1, 2021
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