Acta Photonica Sinica, Volume. 50, Issue 7, 230(2021)
Studies on the Preparation and Properties of Nanocrystalline ZnSX Thin Films by RF Magnetron Sputtering Technique at Room Temperature
In order to obtain high-performance transparent dielectric thin films, nanocrystalline zinc-rich ZnS films were prepared on glass substrates by radio frequency magnetron sputtering with a ZnS ceramic target at room temperature, and the effect of the radio frequency power on the structural, surface morphology and optical properties of the films were studied using X-ray diffraction, field emission scanning electron microscopy, micro-Raman spectroscopy, ultraviolet-visible spectroscopy and spectroscopic ellipsometry. It is found that the radio frequency power has an important impact on the phase formation and crystallinity of the ZnSX films. With the increase in the radio frequency power, the atomic ratio of zinc to sulfur, intensity of the characteristic Raman peak and refraction index first increase and then decrease, the optical band gap of the film deceases from 3.86 eV to 3.76 eV systematically. Among the various radio frequency power values investigated, 150 W is optimal for the growth of highly crystalline ZnSX films with the cubic phase, the ratio of Zn/S of film is 1.23 close to the standard stoichiometric ratio, the average transmittance is more than 80% at visible light, and the optical refractive index of ZnSX film is 2.03 at 550 nm.
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Yang YANG, Gang LI, Kewu JING, Tianqi WANG, Saiao PENG, Tingting YAO, Shuyong CHEN. Studies on the Preparation and Properties of Nanocrystalline ZnSX Thin Films by RF Magnetron Sputtering Technique at Room Temperature[J]. Acta Photonica Sinica, 2021, 50(7): 230
Category: Thin Films
Received: Nov. 16, 2020
Accepted: Feb. 4, 2021
Published Online: Sep. 1, 2021
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