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Optics and Precision Engineering, Volume. 28, Issue 9, 1924(2020)

Preparation of ScAlN thin film through reactive magnetron sputtering

CHEN Yu-xin1...2,*, LIU Yu-fei1,2, and SHANG Zheng-guo12 |Show fewer author(s)
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    CHEN Yu-xin, LIU Yu-fei, SHANG Zheng-guo. Preparation of ScAlN thin film through reactive magnetron sputtering[J]. Optics and Precision Engineering, 2020, 28(9): 1924

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    Received: Feb. 11, 2020

    Accepted: --

    Published Online: Dec. 28, 2020

    The Author Email: Yu-xin CHEN (20133013@cqu.edu.cn)

    DOI:10.37188/ope.20202809.1924

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology