[1] [1] DAI Rong, XIE Tiebang, CHANG Suping. A vertical scanning white-light interfering profilometer［J］. Optical Technique, 2006, 32(4):545-548.

[2] [2] CHEN Kai, CUI Mingqi, ZHENG Lei, et al. Layer thickness measurement of super thin films ［J］. High Power Laser and Particle Beams, 2008(2):234-238.

[3] [3] GUO Zhifeng, GUO Zhaohua, WANG Yongwang, et al. Application of atomic force microscope and white light interferometer in surface material tests［J］. Surface Technology, 2018,47(1):254-259.

[4] [4] WANG Changjun, XIONG Shengming. Correction for film thickness uniformity of large aperture optical components［J］. High Power Laser and Particle Beams, 2007(7):1153-1157.

[5] [5] CHENG Min, ALI E, SUN Zhengwen, et al. Novel correction mask for thickness uniformity improvement of coatings on large aperture aspheric surface［J］. Chinese Journal of Vacuum Science and Technology, 2017,37(3):250-254.

[6] [6] LIANG Haifeng, YAN Yixin. Study on optical properties of diamond-like carbon with ellipsometry［J］. Journal of Vacuum Science and Technology,2005(4):287-289.

[7] [7] MA Xun, LIU Zuming, CHEN TingJin, et al. Thin film material thickness and refractive index measurement by elliptical polarization instrument［J］. Journal of Yunan Normal University(Natural Sciences Edition) ,2005(4):24-27.

[8] [8] FAN Jiangwei, WANG Feng, SUN Qinlei,et al. The thickness determination of SiO2/Si ultra-thin film by spectroscopic ellipsometry through multilayer［J］. Journal of Test and Measurement Technology,2012,26(5):388-392.

[9] [9] LI Yongqian, LI Xiaoying, ZHU Mingquan. A new method to correct the nonlinear errors in heterodyne interferometry［J］. Chinese Journal of Scientific Instrument,2005(5):542-546.

[10] [10] HOU Wenmei, ZHANG Yunbo, LE Yanfen, et al. Elimination of the nonlinearity of heterodyne displacement interferometers［J］. Chinese Journal of Lasers,2012,39(9):162-167.

[11] [11] ZHONG Chaoyang, HOU Wenmei, JU Aisong, et al. Analysis of frequency mixing in dual-frequency interferometer［J］. Optical Technique,2015,41(2):119-123.

[12] [12] SHI Yilei, SU Junhong, YANG Lihong, et al. Measuring thin-film thickness with phase-shift interferometry［J］. Journal of Applied Optics,2009, 30(1):76 -79,83.

[13] [13] SU Junhong, LIU Yichen. Digital Moiré technique for thin film thickness measurement［J］. Chinese Journal of Lasers, 2012,39(11):104-108.

[14] [14] HOU W M , GUNTER W. Investigation and compensation of the nonlinearity of heterodyne interferometers［J］. Precision Engineering, 1992,14(1):91-98.

[15] [15] SHI Kai, SU Junhong, HOU Wenmei. Roll angle measurement system based on differential plane mirror interferometer［J］. Optics Express,2018, 26(16):19826-19834.

[16] [16] LE Yanfen, JU Aisong. Analysis and measurement of the nonlinear errors in heterodyne interferometers［J］. Laser & Optoelectronics Progress, 2016,53(5):203-212.