Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Journal of Applied Optics, Volume. 40, Issue 3, 473(2019)

Method of thin film thickness measurement based on laser heterodyne interferometry

SHI Kai1,2, SU Junhong1,2, and QI Yuan3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
    • show less
    AbstractGet PDF
    Figures&Tables (0)
    Equations (0)
    References (16)
    Tools
    Paper Information
    Topics
    Figures & Tables(0)
    Tools

    Get Citation

    Copy Citation Text

    SHI Kai, SU Junhong, QI Yuan. Method of thin film thickness measurement based on laser heterodyne interferometry[J]. Journal of Applied Optics, 2019, 40(3): 473

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category:

    Received: Oct. 17, 2018

    Accepted: --

    Published Online: Jun. 10, 2019

    The Author Email:

    DOI:10.5768/jao201940.0303003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology