Fig. 1. Schematic of FDTD simulation model

Fig. 2. Transmittance of upper surface gratings with different periods in the wavelength range of 500~1 500 nm

Fig. 3. Transmittance of lower surface gratings with different periods in the wavelength range of 500~1500 nm

Fig. 4. Mathematical model of vibration-assisted nanoimprint mechanism

Fig. 5. Influence of vibration frequency on filling rate of the upper surface

Fig. 6. Influence of vibration amplitude on filling rate of the upper surface

Fig. 7. Influence of vibration amplitude on filling rate of lower surface

Fig. 8. Flow chart of vibration-assisted nanoimprinting experiment

Fig. 9. Vibration-assisted nanoimprinting device

Fig. 10. SEM inspection image of grating structure

Fig. 11. SEM inspection image of grating structure prepared by traditional nanoimprint

Fig. 12. The transmittance test diagram of SiO₂ without film and SiO₂ with double-sided grating structure film prepared by vibration-assisted nanoimprinting and conventional nanoimprinting