Acta Optica Sinica, Volume. 33, Issue 6, 622001(2013)

Design of All Spherical Surfaces Zoom Lithographic System

Lü Bo1,2、*, Liu Weiqi1, Kang Yusi1, Feng Rui1, Liu Hua1, and Wei Zhonglun1
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    Lü Bo, Liu Weiqi, Kang Yusi, Feng Rui, Liu Hua, Wei Zhonglun. Design of All Spherical Surfaces Zoom Lithographic System[J]. Acta Optica Sinica, 2013, 33(6): 622001

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Sep. 19, 2012

    Accepted: --

    Published Online: Feb. 26, 2013

    The Author Email: Bo Lü (jllvbo@163.com)

    DOI:10.3788/aos201333.0622001

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