Fig. 1. Motion errors of rotation axis

Fig. 2. Measuring principle of rotation axis tilt error

Fig. 3. Linkage coordinate system of DH model

Fig. 4. Tilt error motion compensation method

Fig. 5. Kinematic modeling method with tilt error compensation of rotation axis

Fig. 6. Home-made length standard parts

Fig. 7. Measurement results and fitting curves of tilt error of part of rotating axes

Fig. 8. Distribution of home-made length standard parts

Fig. 9. Measurement errors of home-made length standard parts before and after calibration

Fig. 10. Comparison of measurement results of home-made length standard parts based on two different models