Piezoelectrics & Acoustooptics, Volume. 42, Issue 3, 345(2020)

Effect of Nitrogen-Argon Flow Ratio on ErAlN Film and SAW Filter

SUN Xian... XIE Yiwei, XU Shaojun and YANG Chengtao* |Show fewer author(s)
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    References(13)

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    [3] [3] LIMSUWAN P, UDOMKAN N, MEEJOO S, et al. Surface morphology of submicron crystals in aluminum nitride films grown by dc magnetron sputtering[J]. Int J Mod Phys B, 2005, 19(12):2073-2083.

    [4] [4] LEI W, SHUMING C, JINYING Z, et al. High performance 33.7 GHz surface acoustic wave nanotransducers based on AlScN/diamond/Si layered structures[J]. Appl Phys Lett, 2018,113(9): 0935.

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    [9] [9] FERENC T, BJORN A, CARINA H, et al. Origin of the anomalous piezoelectric response in wurtzite ScxAl1-xN alloys[J]. Phys Rev Lett, 2010, 104(13):137601.

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    SUN Xian, XIE Yiwei, XU Shaojun, YANG Chengtao. Effect of Nitrogen-Argon Flow Ratio on ErAlN Film and SAW Filter[J]. Piezoelectrics & Acoustooptics, 2020, 42(3): 345

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    Paper Information

    Received: Dec. 10, 2019

    Accepted: --

    Published Online: Apr. 21, 2022

    The Author Email: Chengtao YANG (ctyang@uestc.edu.cn)

    DOI:10.11977/j.issn.1004-2474.2020.03.014

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