Piezoelectrics & Acoustooptics, Volume. 42, Issue 3, 345(2020)
Effect of Nitrogen-Argon Flow Ratio on ErAlN Film and SAW Filter
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SUN Xian, XIE Yiwei, XU Shaojun, YANG Chengtao. Effect of Nitrogen-Argon Flow Ratio on ErAlN Film and SAW Filter[J]. Piezoelectrics & Acoustooptics, 2020, 42(3): 345
Paper Information
Received: Dec. 10, 2019
Accepted: --
Published Online: Apr. 21, 2022
The Author Email: Chengtao YANG (ctyang@uestc.edu.cn)
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