Opto-Electronic Engineering, Volume. 51, Issue 11, 240194-1(2024)
A scanning micro phase measuring profilometry based on optical flow pixel matching
Fig. 2. PDF distribution with different phase shift errors and their error curves. (a) The PDF of the wrapped phase calculated at different periods; (b) Comparison of the results of the period of calibration and the optimal period calculation; (c) RMSE distribution of calculation results at different periods; (d) RMSE between wrapped phase and static 12-steps phase-shift calculated at different periods
Fig. 6. The measurement result of a coin. (a, h),(b, i),(c, j)3, 6, 12-step of classic phase shift; (d, k),(e, l),(f, m) Proposed method 3, 6, 12-step scanning phase shift
Fig. 7. Phase error of different scanning steps and static phase shift
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Siyuan Wang, Yuankun Liu, Xin Yu. A scanning micro phase measuring profilometry based on optical flow pixel matching[J]. Opto-Electronic Engineering, 2024, 51(11): 240194-1
Category: Article
Received: Aug. 19, 2024
Accepted: Sep. 26, 2024
Published Online: Jan. 24, 2025
The Author Email: Liu Yuankun (刘元坤)