Opto-Electronic Engineering, Volume. 51, Issue 11, 240194-1(2024)

A scanning micro phase measuring profilometry based on optical flow pixel matching

Siyuan Wang... Yuankun Liu* and Xin Yu |Show fewer author(s)
Author Affiliations
  • School of Electronics and Information Engineering, Sichuan University, Chendu, Sichuan 610065, China
  • show less
    Figures & Tables(10)
    The schematic of scanning PMP
    PDF distribution with different phase shift errors and their error curves. (a) The PDF of the wrapped phase calculated at different periods; (b) Comparison of the results of the period of calibration and the optimal period calculation; (c) RMSE distribution of calculation results at different periods; (d) RMSE between wrapped phase and static 12-steps phase-shift calculated at different periods
    Flowchart of the proposed method
    The experimental system and object
    The fringe and the white field are collected
    The measurement result of a coin. (a, h),(b, i),(c, j)3, 6, 12-step of classic phase shift; (d, k),(e, l),(f, m) Proposed method 3, 6, 12-step scanning phase shift
    Phase error of different scanning steps and static phase shift
    • Table 1. The matching quantity and phase-shift quantity calculated by optical flow method

      View table
      View in Article

      Table 1. The matching quantity and phase-shift quantity calculated by optical flow method

      白场/第2k-1帧1357911131517192123
      匹配量/pixel[0 0][2.4 0.1][4.6 0.1][7.2 0.2][9.4 0.2][11.6 0.2][14.2 0.2][16.5 0.2][18.7 0.2][21.3 0.3][23.5 0.3][25.8 0.3]
      条纹场/第2k24681012141618202224
      相移量/rad00.6561.2571.9672.5683.1693.8804.5085.1095.8196.4207.048
    • Table 2. RMSE of different steps scan wrapped phase

      View table
      View in Article

      Table 2. RMSE of different steps scan wrapped phase

      扫描步数RMSE/rad参与计算的图像序号硬币位置1硬币位置2
      3步2, 8, 160.04570.0386
      6步2, 4, 6, 10, 14, 180.03190.0289
      12步全部0.02960.0262
    • Table 3. Error analysis of planes with different heights

      View table
      View in Article

      Table 3. Error analysis of planes with different heights

      0.4 mm1.2 mm2 mm
      m1/mm0.39731.20021.9936
      m2/mm0.39671.19371.9907
      RMSE1/mm0.00950.00990.0087
      RMSE2/mm0.01200.01140.0116
    Tools

    Get Citation

    Copy Citation Text

    Siyuan Wang, Yuankun Liu, Xin Yu. A scanning micro phase measuring profilometry based on optical flow pixel matching[J]. Opto-Electronic Engineering, 2024, 51(11): 240194-1

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Article

    Received: Aug. 19, 2024

    Accepted: Sep. 26, 2024

    Published Online: Jan. 24, 2025

    The Author Email: Liu Yuankun (刘元坤)

    DOI:10.12086/oee.2024.240194

    Topics