[1] [1] CHEN D X, YIN B H, LIN Y S, et al.. Feed-forward and feed-back controller for large-range and high-speed AFM ［J］. Opt.Precision Eng., 2011, 19(4): 836-843.(in Chinese)

[2] [2] GAO S T, YE X Y, SH H W, et al.. Atomic force microscope for nanometer 3D surface shape and micro size measuring ［J］. Manufacturing Technology & Machine Tool, 2004, 8:34-39.(in Chinese)

[3] [3] FRANZ J, GIESSIBL. Advances in atomic force microscopy ［J］. Reviews of Modern Physics, 2003, 7(75): 949-978.

[4] [4] ADAM W, MAYER J R R. A robust method for probe tip radius correction in coordinate metrology ［J］. Measurement Science and Technology, 2012, 23.

[5] [5] SANTIAGO D S. Characterization of deepnanoscale surface trenches with AFM using thin carbon nanotube probes in amplitude-modulation and frequency-force-modulation modes［J］. Measurement Science and Technology, 2008, 19(1): 015503-1-10.

[6] [6] NDUBUISI G O, THEODORE V V, JOSEPH F, et al.. Line edge roughness metrology using atomic force microscopes ［J］. Measurement Science and Technology, 2005, 16: 2147-2154.

[7] [7] MANCEVSKI V, MCCLURE P F. Development of a dual-probe CaliperTM CD-AFM for near model independent nanometrology ［C］. Proc. SPIE, 2003, 4689, :83-91.

[8] [8] TERUNOBU A, NICOLAAS F, DE ROOIJ, et al.. Implementation and characterization of a quartz tuning fork based probe consisted of discrete resonators for dynamic mode atomic force microscopy ［J］. Review of Scientific Instruments, 2010, 81, 063706.

[9] [9] AKIYAMA T, STAUFER U, DE ROOIJ N F, et al.. Symmetrically arranged quartz tuning fork with soft cantilever for intermittent contact mode atomic force microscopy ［J］. Review of Scientific Instruments, 2003, 74(1): 112-117.

[10] [10] DING X H, DENG SH X, YANG Y Y, et al.. Sub-pixel edge detection based on spatial moment and zernike moment ［J］. Journal of Applied Sciences, 2004, 22(2): 191-194.(in Chinese)

[11] [11] LI J Q, WANG J W, CHEN SH B, et al.. Improved algorithm of subpixel edge detection using Zernike orthogonal moments ［J］. Optical Technique, 2003, 29(4): 500-503.(in Chinese)

[12] [12] ANCZYKOWSKI B, GOTSMANN B, FUCHS H, et al.. How to measure energy dissipation in dynamic mode atomic force microscopy ［J］. Applied Surface Science, 1999, 140(3-4): 376-382.

[13] [13] WANG L L, LU M ZH, GUO T, et al.. Simulation and signal analysis of Akiyama probe applied to atomic force microscope ［C］. Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 2013.