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Optics and Precision Engineering, Volume. 22, Issue 9, 2399(2014)

Vision alignment system for AFM with dual probes

ZHANG Hua-kun1,*... GAO Si-tian1,2, LU Ming-zhen2, LI Wei2 and WANG Long-long3 |Show fewer author(s)
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  • 2[in Chinese]
  • 3[in Chinese]
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    ZHANG Hua-kun, GAO Si-tian, LU Ming-zhen, LI Wei, WANG Long-long. Vision alignment system for AFM with dual probes[J]. Optics and Precision Engineering, 2014, 22(9): 2399

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    Received: Dec. 20, 2013

    Accepted: --

    Published Online: Oct. 23, 2014

    The Author Email: Hua-kun ZHANG (zhanghk@nim.ac.cn)

    DOI:10.3788/ope.20142209.2399

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology