Acta Optica Sinica, Volume. 33, Issue 11, 1111001(2013)
Fast Lithography Simulation for One-Dimensional Layout
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Xie Chunlei, Shi Zheng, Lin Bin. Fast Lithography Simulation for One-Dimensional Layout[J]. Acta Optica Sinica, 2013, 33(11): 1111001
Paper Information
Category: Imaging Systems
Received: Apr. 2, 2013
Accepted: --
Published Online: Sep. 30, 2013
The Author Email: Chunlei Xie (xiecl@vlsi.zju.edu.cn)
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