Optics and Precision Engineering, Volume. 19, Issue 12, 2927(2011)
H type micro-machined resonant pressure sensor based on self-stopped etch technique
[1] [1] WANG J B, CHEN D Y, LI Y X, et al.. A micromachined resonant pressure sensor with DETFs resonator and differential structure[C]. IEEE Sensors Conference, 2009:1321-1324.
[2] [2] GREENWOOD J C, SATCHELL D W. Miniature silicon resonant pressure sensor [J]. IEEE Proceedings, 1988, 135(5):369-372.
[3] [3] ZARNIK M S, BELAVIC D.Feasibility study of a thick-film PZT resonant pressure sensor made on a prefired 3D LTCC structure[J]. International Journal of Applied of Ceramic Technology, 2009, 6(1):9-17.
[5] [5] CHEN L, CHEN D Y, WANG J B. Micromachined vibrating ring gyroscope [J]. Opt. Precision Eng., 2009, 17(8):1344-1349. (in Chinese)
[8] [8] ZHAO Y. New dielectrical material for MCM-photosensitive BCB [J]. Electronic Component & Device Applications, 2002, 4(3):43-46. (in Chinese)
[9] [9] CHEN D Y, WANG J B, LI Y X, et al.. A novel laterally driven micromachined resonant pressure sensor[C]. Sensors Conference, 2010:1727.
[10] [10] LIU M, WANG J B, LI Y X, et al.. Research on closed loop control for resonant MEMS pressure sensor with electromagnetic excitation [J]. Chinese Journal of Sensors and Actuators, 2010, 23(8):1066-1069. (in Chinese)
[11] [11] LONG L. Progress and application for MEMS packaging technologies [J].Electronics and Packaging, 2005, 3(5):1-5. (in Chinese)
[12] [12] XU W, WANG Y CH, LUO L. Wafer level hermetic package of MEMS by glass solder at low temperature[J].Journal of Functional Material and Devices, 2005, 11(3) :343-346.(in Chinese)
[13] [13] LIU Y F, LIU W P, LI S H, et al..Low temperature wafer level hermetic package with benzo-cyclo-butene material [J].Semiconductor Photonics and Technology, 2006, 12(1):39-42.
Get Citation
Copy Citation Text
LI Yu-xin, CHEN De-yong, WANG Jun-bo, JIAO Hai-long, LUO Zhen-yu. H type micro-machined resonant pressure sensor based on self-stopped etch technique[J]. Optics and Precision Engineering, 2011, 19(12): 2927
Category:
Received: Apr. 12, 2011
Accepted: --
Published Online: Dec. 22, 2011
The Author Email: Yu-xin LI (liyuxin107@mails.gucas.ac.cn)