Optics and Precision Engineering, Volume. 19, Issue 12, 2927(2011)

H type micro-machined resonant pressure sensor based on self-stopped etch technique

LI Yu-xin*... CHEN De-yong, WANG Jun-bo, JIAO Hai-long and LUO Zhen-yu |Show fewer author(s)
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    References(13)

    [1] [1] WANG J B, CHEN D Y, LI Y X, et al.. A micromachined resonant pressure sensor with DETFs resonator and differential structure[C]. IEEE Sensors Conference, 2009:1321-1324.

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    [3] [3] ZARNIK M S, BELAVIC D.Feasibility study of a thick-film PZT resonant pressure sensor made on a prefired 3D LTCC structure[J]. International Journal of Applied of Ceramic Technology, 2009, 6(1):9-17.

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    [8] [8] ZHAO Y. New dielectrical material for MCM-photosensitive BCB [J]. Electronic Component & Device Applications, 2002, 4(3):43-46. (in Chinese)

    [9] [9] CHEN D Y, WANG J B, LI Y X, et al.. A novel laterally driven micromachined resonant pressure sensor[C]. Sensors Conference, 2010:1727.

    [10] [10] LIU M, WANG J B, LI Y X, et al.. Research on closed loop control for resonant MEMS pressure sensor with electromagnetic excitation [J]. Chinese Journal of Sensors and Actuators, 2010, 23(8):1066-1069. (in Chinese)

    [11] [11] LONG L. Progress and application for MEMS packaging technologies [J].Electronics and Packaging, 2005, 3(5):1-5. (in Chinese)

    [12] [12] XU W, WANG Y CH, LUO L. Wafer level hermetic package of MEMS by glass solder at low temperature[J].Journal of Functional Material and Devices, 2005, 11(3) :343-346.(in Chinese)

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    CLP Journals

    [1] CHEN De-yong, CAO Ming-wei, WANG Jun-bo, JIAO Hai-long, ZHANG Jian. Fabrication and wafer-level vacuum packaging of MEMS resonant pressure sensor[J]. Optics and Precision Engineering, 2014, 22(5): 1235

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    LI Yu-xin, CHEN De-yong, WANG Jun-bo, JIAO Hai-long, LUO Zhen-yu. H type micro-machined resonant pressure sensor based on self-stopped etch technique[J]. Optics and Precision Engineering, 2011, 19(12): 2927

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    Paper Information

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    Received: Apr. 12, 2011

    Accepted: --

    Published Online: Dec. 22, 2011

    The Author Email: Yu-xin LI (liyuxin107@mails.gucas.ac.cn)

    DOI:10.3788/ope.20111912.2927

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