Optics and Precision Engineering, Volume. 19, Issue 12, 2927(2011)
H type micro-machined resonant pressure sensor based on self-stopped etch technique
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LI Yu-xin, CHEN De-yong, WANG Jun-bo, JIAO Hai-long, LUO Zhen-yu. H type micro-machined resonant pressure sensor based on self-stopped etch technique[J]. Optics and Precision Engineering, 2011, 19(12): 2927
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Received: Apr. 12, 2011
Accepted: --
Published Online: Dec. 22, 2011
The Author Email: Yu-xin LI (liyuxin107@mails.gucas.ac.cn)
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