Optics and Precision Engineering, Volume. 19, Issue 12, 2927(2011)

H type micro-machined resonant pressure sensor based on self-stopped etch technique

LI Yu-xin*... CHEN De-yong, WANG Jun-bo, JIAO Hai-long and LUO Zhen-yu |Show fewer author(s)
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    In order to increase accuracy and reduce temperature drifts of pressure sensors, a micro-machined resonant pressure sensor with H-type doubly-clamped lateral beams was proposed based on electromagnetically driving and differential detection. First, Finite Element Method(FEM) analysis was performed to guarantee the sensitivity and the resolution of the sensor. Then, based on the boron-diffusion self-stopped etch technique, a sensor sample with good uniformity was achieved by a standard bulk Micro-electro-mechanical System(MEMS) process. Finally, the vacuum package of the sensor was accomplished by adhesive bonding using non-photosensitive BCB(Benzocy-clobutene, DVS-BCB-3022-46) and stress isolation. Experimental results show that the nonlinearity is lower than 0.02% in 0 to 120 kPa with a accuracy of 0.05% FS, and the temperature drift is less than 0.05%/℃ in -40 ℃ to 70 ℃.The sensor can suppress temperature drifts and realize pressure measurement in wide measuring range and higher precision.

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    LI Yu-xin, CHEN De-yong, WANG Jun-bo, JIAO Hai-long, LUO Zhen-yu. H type micro-machined resonant pressure sensor based on self-stopped etch technique[J]. Optics and Precision Engineering, 2011, 19(12): 2927

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    Paper Information

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    Received: Apr. 12, 2011

    Accepted: --

    Published Online: Dec. 22, 2011

    The Author Email: Yu-xin LI (liyuxin107@mails.gucas.ac.cn)

    DOI:10.3788/ope.20111912.2927

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