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Optics and Precision Engineering, Volume. 25, Issue 1, 100(2017)

Atomic step morphology research of LED sapphire substrate polishing surface and its periodicity

ZHOU Yan1...2,3, PAN Guo-shun1,2,3, SHI Xiao-lei1,2,3, GONG Hua1,2,3, ZOU Chun-li1,2,3 and TANG Jiao-ning4 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    ZHOU Yan, PAN Guo-shun, SHI Xiao-lei, GONG Hua, ZOU Chun-li, TANG Jiao-ning. Atomic step morphology research of LED sapphire substrate polishing surface and its periodicity[J]. Optics and Precision Engineering, 2017, 25(1): 100

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    Received: Jun. 10, 2016

    Accepted: --

    Published Online: Mar. 10, 2017

    The Author Email:

    DOI:10.3788/ope.20172501.0100

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology