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Acta Photonica Sinica, Volume. 47, Issue 1, 122002(2018)

Design of Aspherical Zoom Optical System in Immersion Lithography Lighting System

LI Mei-xuan1,2、*, WANG Li1, and DONG Lian-he1
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  • 1[in Chinese]
  • 2[in Chinese]
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    LI Mei-xuan, WANG Li, DONG Lian-he. Design of Aspherical Zoom Optical System in Immersion Lithography Lighting System[J]. Acta Photonica Sinica, 2018, 47(1): 122002

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    Paper Information

    Received: Jun. 16, 2017

    Accepted: --

    Published Online: Jan. 30, 2018

    The Author Email: Mei-xuan LI (limeixuannuc@163.com)

    DOI:10.3788/gzxb20184701.0122002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology