Journal of Infrared and Millimeter Waves, Volume. 44, Issue 1, 16(2025)

Correlation between the whole small recess offset and electrical performance of InP-based HEMTs

Hang GONG1...2, Fu-Gui ZHOU1,2, Ruize FENG1,2, Zhi-Yu FENG1,2, Tong LIU1, Jing-Yuan SHI1,2, Yong-Bo SU1,2,*, and Zhi JIN12,** |Show fewer author(s)
Author Affiliations
  • 1High-Frequency High-Voltage Device and Integrated Circuits Center,Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China
  • 2University of Chinese Academy of Sciences(UCAS),Beijing 100049,China
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    References(21)

    [1] D Kim, J Alamo. 30-nm InAs PHEMTs With fT = 644 GHz and fmax = 681 GHz. IEEE Electron Device Letters, 31, 806-808(2010).

    [11] D Kim, J Alamo, J Lee et al. The Impact of Side-Recess Spacing on the Logic Performance of 50 nm InGaAs HEMTs, 177-180(2006).

    [20] Guo Zhou, Yingsheng Bi, Zhuo Chen et al. Preparation and Performances of InP HEMT Device with Cavity Gate Structure. Semiconductor Technology.

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    Hang GONG, Fu-Gui ZHOU, Ruize FENG, Zhi-Yu FENG, Tong LIU, Jing-Yuan SHI, Yong-Bo SU, Zhi JIN. Correlation between the whole small recess offset and electrical performance of InP-based HEMTs[J]. Journal of Infrared and Millimeter Waves, 2025, 44(1): 16

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    Paper Information

    Category: Infrared Physics, Materials and Devices

    Received: Mar. 5, 2024

    Accepted: --

    Published Online: Mar. 5, 2025

    The Author Email: SU Yong-Bo (suyongbo@ime.ac.cn), JIN Zhi (jinzhi@ime.ac.cn)

    DOI:10.11972/j.issn.1001-9014.2025.01.003

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