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International Journal of Extreme Manufacturing, Volume. 5, Issue 3, 35101(2023)

Electric-driven flexible-roller nanoimprint lithography on the stress-sensitive warped wafer

Yu Fan1...2, Chunhui Wang1,*, Jiaxing Sun1, Xiaogang Peng1, Hongmiao Tian1, Xiangming Li1,2, Xiaoliang Chen1,2, Xiaoming Chen1, and Jinyou Shao12 |Show fewer author(s)
Author Affiliations
  • 1Micro-and Nano-technology Research Center, State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, People’s Republic of China
  • 2Frontier Institute of Science and Technology (FIST), Xi’an Jiaotong University, Xi’an 710049, People’s Republic of China
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    Yu Fan, Chunhui Wang, Jiaxing Sun, Xiaogang Peng, Hongmiao Tian, Xiangming Li, Xiaoliang Chen, Xiaoming Chen, Jinyou Shao. Electric-driven flexible-roller nanoimprint lithography on the stress-sensitive warped wafer[J]. International Journal of Extreme Manufacturing, 2023, 5(3): 35101

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    Paper Information

    Received: Jan. 13, 2023

    Accepted: --

    Published Online: Jul. 26, 2024

    The Author Email: Wang Chunhui (chw-nanoman@xjtu.edu.cn)

    DOI:10.1088/2631-7990/acd827

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology