Acta Photonica Sinica, Volume. 34, Issue 1, 154(2005)

Silicon Nitride Thin Films Deposited by R.F. Magnetron Sputtering

[in Chinese]... [in Chinese], [in Chinese] and [in Chinese] |Show fewer author(s)
Author Affiliations
  • [in Chinese]
  • show less
    References(6)

    [1] [1] Powell M J,Orton J W. Characteristics of amorphous silicon staggered-electrode thin-film transistors.Appl Phys Lett, 1984,45(2):171~173

    [2] [2] Solgaard O,Sandejas F S A, Bloom D M. Deformable grating optical modulator. Optics Lett,1992,17(9):688~690

    [3] [3] Kishore R,Singh S N,Das B K. Screen printed titanium oxide and PECVD silicon nitride as antireflection coating on silicon solar cells.Renewable Energy, 1997,12(2):131~135

    [4] [4] Lee S H,Lee I,Yi J. Silicon nitride films prepared by high-density plasma chemical vapor deposition for solar cell applications.Surf Coat Technol,2002,153(1):67~71

    [5] [5] Qiu X,yarmati E. Composition and properties of SiNx films produced by reactive r.f. magnetron sputtering. Thin Solid Films,1987,151(2):223~233

    [6] [6] Xu Gang,Jin Ping,Tazawa Masato, et al. Optical investigation of silicon nitride thin films deposited by r.f. magnetron sputtering.Thin solid Films,2003,425(1):196~202

    CLP Journals

    [1] GAN Shu-yi, LIU Zheng-kun, SHENG Bin, XU Xiang-dong, HONG Yi-lin, LIU Ying, ZHOU Hong-jun, HUO Tong-lin, FU Shao-jun. Reflectance of Ir Layer in Vacuum Ultraviolet Wavelength Region Deposited by Ion Beam Sputtering[J]. Acta Photonica Sinica, 2009, 38(5): 1207

    [2] Xu Xu, He Wenyan, Wang Changjun, Wei Ming, Li Bincheng. Durable Silver Reflector Prepared by Magnetron Sputtering[J]. Chinese Journal of Lasers, 2016, 43(12): 1203002

    Tools

    Get Citation

    Copy Citation Text

    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Silicon Nitride Thin Films Deposited by R.F. Magnetron Sputtering[J]. Acta Photonica Sinica, 2005, 34(1): 154

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Nov. 24, 2003

    Accepted: --

    Published Online: Jun. 12, 2006

    The Author Email:

    DOI:

    Topics