Acta Photonica Sinica, Volume. 34, Issue 1, 154(2005)
Silicon Nitride Thin Films Deposited by R.F. Magnetron Sputtering
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Silicon Nitride Thin Films Deposited by R.F. Magnetron Sputtering[J]. Acta Photonica Sinica, 2005, 34(1): 154