[1] Tu Shi, Yongying Yang, Lei Zhang, et al. Surface testing methods of aspheric optical elements. Chinese Optics, 7, 26-46(2014).

[2] Xiaobing Zhang. Review on manufacture and measurement method of aspheric surface optical part. Ordnance Material Science and Engineering, 37, 106-111(2014).

[3] [3] Wang Hongchen. Development machine of tool machining method f rotated conicoid using nmal equidistance method [D]. Changchun: Changchun University of Technology, 2007. (in Chinese)

[4] Zijian Liang, Yongying Yang, Hongyang Zhao, et al. Advances in research and applications of optical aspheric surface metrology. Chinese Optics, 15, 161-186(2022).

[5] [5] Shu Chaolian. Modern Optical Manufacturing Technology [M]. Beijing: National Defense Industry Press, 2008. (in Chinese)

[6] Chijuan Li, Changfeng Sun, Zhe Xi, et al. Application of optical aspheric element. Laser and Infrared, 43, 244-247(2013).

[7] [7] Li Shuping, Zhang Yu. Application of single point diamond turning in infrared optics[C]Proceedings of the 2016 International Symposium on Advances In Electrical, Electronics Computer Engineering, 2016.

[8] [8] Luo Chi, Shi Feng, Tian Ye, et al. A combination process of magheological finishing computer controlled optical surfacing on singlecrystal silicon surface[C]International Symposium on Advanced Optical Manufacturing Testing Technologies (AOMATT), 2019.

[9] [9] Karabyn V, Polák J, Procháska F, et al. Ion beam figuring with using Einzel lens[C]Optics Measurement 2019 International Conference, 2019, 11385: 1138508.

[10] Wenlin Liao, Yifan Dai, Xuqing Nie, et al. Rapid fabrication technique for nanometer-precision aspherical surfaces. Applied Optics, 54, 1629-1638(2015).

[11] [11] Sun Dan. Study on the acteristics of precise surface defects optical micro scattering imaging system[D]. Hangzhou: Zhejiang University, 2006. (in Chinese)

[12] Yichuan Xiang, Youxi Lin, Zhiying Ren. Study on surface defect detection method of optical element. Optical Instruments, 40, 78-87(2018).

[13] Hongxiang Wang, Lu Shen, Chengfu Li, et al. Analysis and experimental investigation of laser induced damage of optics. Chinese Journal of Lasers, 44, 0302006(2017).

[14] Kewei You, Yanli Zhang, Xuejie Zhang, et al. Influence of relative position of optical component surface defects on near field beam quality. Chinese Journal of Lasers, 42, 0308004(2015).

[15] Bingqiang Ren, Huijie Huang, Weixin Zhang, et al. Online inspection apparatus and experiments on optics damage. High Power Laser and Particle Beams, 16, 465-468(2004).

[16] [16] Rainer F. Mapping inspection of damage artifacts in largescale optics[C]Proceedings of SPIE, Laser Damage, 1998, 3244: 272281.

[17] [17] Chen Zhu. Research on threedimensional topography measurement of optical element surface defects based on digital holography [D]. Mianyang: Academy of Engineering Physics, 2017. (in Chinese)

[18] [18] Chu Hongyu. Research on surface defect detection technology of high power laser device based on machine vision [D]. Chongqing: Chongqing University, 2011. (in Chinese)

[21] Kosmopoulos Dimitrios, Varvarigou Theodora. Automated inspection of gaps on the automobile production line through stereo vision and specular reflection. Computers in Industry, 46, 49-63(2001).

[22] [22] International Stard ganization. ISO 101107: 2008(E), Optics photonics preparation of drawings f optical elements systems Part 7: Surface imperfection tolerances [S]. Geneva: International Stard ganization, 2008.

[24] [24] U. S. Army. MILPRF13830 B Optical components f fire control instruments; General specification governing the manufacture, assembly, inspection of [S]. U. S. Army, 1997.

[26] [26] Aikens D M, Bissinger H D. Overview of small optics f the National Ignition Facility [C]Proceedings of SPIE, 1999, 3782: 476487.

[27] [27] Xiao Bing. Discussion research on key problems of automatic inspection system f surface defects of large aperture optical elements [D]. Hangzhou: Zhejiang University, 2010. (in Chinese)

[28] [28] Mi Zengzhen. Surface defect detection analysis of optical elements based on digital image processing technology [D]. Chongqing: Chongqing University, 2011. (in Chinese)

[29] F W Preston. The structure of abraded glass surfaces. Transactions of the Optical Society, 23, 141-164(1922).

[30] Yuanqing Wang. Measurement of surface flaw by grazing incidence. Applied Laser, 18, 55-58(1998).

[31] Shitao Deng, Xiaotong Li, Zhaofeng Cen, et al. Paraxial calculation and analysis of ghosts in Shenguang III prototype device. Opto-Electronic Engineering, 31, 10-13(2004).

[32] [32] Li Dongming. Optical design key technology research of Shenguang Ⅲ far field diagnosis system [D]. Hangzhou: Zhejiang University, 2004. (in Chinese)

[33] [33] He Zhiping. Stray light analysis of laser multipass amplification system[D]. Hangzhou: Zhejiang University, 2003. (in Chinese)

[34] [34] Cao Pin. Research on key technologies in surface defect evaluation system of spherical optical elements [D]. Hangzhou: Zhejiang University, 2015. (in Chinese)

[35] Xian Tao, Wei Hou, De Xu. A survey of surface defect detection methods based on deep learning. Acta Automatica Sinica, 47, 1017-1034(2021).

[36] Dong Wang, Wanyi Li, Jia Sun, et al. Research of small parts’ surface defects inspection based on machine vision. Applied Science And Technology, 45, 131-136(2018).

[38] Yali Shi, Xian Tao, Xinda Zhou, et al. An online laser-induced flaw inspection device for optical elements. Infrared and Laser Engineering, 47, 0417003(2018).

[39] Xi Hou, Fan Wu, Li Yang, et al. Layout model and analysis of annular subaperture stitching technique for testing large aspheric mirror. Optics and Precision Engineering, 14, 207-212(2006).

[40] Yaoping Zhang, Yundong Zhang, Ning Ling, et al. Study on the influence of substance temperature on the defect and optical performance of single YbF3 films. Optical Instruments, 28, 93-96(2006).

[41] Wenxue Zhang, Jihong Wang, Ge Ren. Optical system design for on-line defects detection of optical components. Journal of Applied Optics, 40, 779-785(2019).

[42] [42] Zhang Wenxue. Research on online detection technology of optical element defects [D]. Chengdu: University of Chinese Academy of Sciences (Institute of Optics Electronics, Chinese Academy of Sciences), 2020. (in Chinese)

[43] Yuan’an Zhao, Jianda Shao, Xiaofeng Liu, et al. Tracking and understanding laser damage events in optics. High Power Laser and Particle Beams, 34, 61-72(2022).

[45] Heng Zhang, Sikun Li, Xiangchao Wang, et al. 3D rigorous simulation of defective masks used for euv lithography via machine learning-based calibration. Acta Optica Sinica, 38, 1222002(2018).

[46] [46] Ma Tianjiao. Research on defect detection recognition methods based on machine vision [D]. Changchun: University of Chinese Academy of Sciences (Changchun Institute of Optics, Precision Mechanics Physics, Chinese Academy of Sciences), 2018. (in Chinese)

[47] [47] Yang Huiqi. Structural design experimental research of large aperture sphericalaspheric defect detect [D]. Changchun: Changchun Institute of Optics, Precision Mechanics Physics, Chinese Academy of Sciences, 2017. (in Chinese)

[48] Huiqi Yang, Xianling Li. Accuracy modeling and prediction of optical element surface defect detector. Machinery Design and Manufacture, 98-101(2018).

[49] [49] Chen Xue. Research on key technologies f defect detection of large caliber high precision optical components [D]. Changchun: University of Chinese Academy of Sciences (Changchun Institute of Optics, Precision Mechanics Physics, Chinese Academy of Sciences), 2020. (in Chinese)

[50] Xiang He, Lei Xie, Heng Zhao, et al. Characterization of polishing induced subsurface damages in fused silica optics. High Power Laser and Particle Beams, 28, 151108(2016).

[51] Yunti Pu, Gang Wang, Zhao Qiao, et al. Damage mechanisms of optical glass with gold nano-defects under laser irradiation. Infrared and Laser Engineering, 44, 3229-3233(2015).

[56] Min Lu, Zhile Wang, Pingping Gao, et al. Defect detection and current situation of optical components. Optical Instruments, 42, 88-94(2020).

[57] [57] Langer G, Langer A, Buchegger B, et al. Frequency domain optical resolution photoacoustic fluescence microscopy using a modulated laser diode[C]Proceedings of SPIE, BiOS, 2017, 10064: 1006426.

[58] Ruyu Tang, De’an Liu, Jianqiang Zhu. Micro-size damage adaptive detection technology based on local signal-to-noise ratio. Chinese Journal of Lasers, 45, 0704001(2018).

[59] [59] Yin Chaoyang. Research on automatic detection repair system of surface micro defects of aspheric optical elements [D]. Harbin: Harbin Institute of Technology, 2020. (in Chinese)

[60] Xianghui Tian, Dazhao Song, Xueqiu He, et al. Surface microtopography and micromechanics of various rank coals. International Journal of Minerals, Metallurgy and Materials, 26, 1351-1363(2019).

[61] Zhiguo Han, Suoyin Li, Yanan Feng, et al. Development of contact profilometer probe status inspection graphic sample block. Micronanoelectronic Technology, 56, 761-765(2019).

[62] Zhenwu Bao, Jianfei Liu, Hongtao Huo, et al. Theory and experiments about optical stylus method. Acta Optica Sinica, 19, 1523-1529(1999).

[63] Junqing Sun, Daoyuan Qiu. Theory and experiment of optical fiber probe profilemeter. Journal of University of Electronic Science and Technology of China, 32, 35-38(2003).

[64] Jie Zhu, Runguang Sun. Introduction to atomic force microscope and its manipulation. Life Science Instruments, 3, 22-26(2005).

[65] Jianqiang Qian, Song Gao, Jin Yu, et al. Laser atomic force microscopy and its observation on the surface of optical materials. Journal of Chinese Electron Microscopy Society, 198(1993).

[66] Jianqiang Qian, Jin Yu, Song Gao, et al. Laser atomic force microscope and its study on optical surface roughness. Journal of Chinese Electron Microscopy Society, 200(1993).

[67] Jianbai Li, Dacheng Li, Xiaoyun Li, et al. Study on measuring the micro profile of optical super smooth surface by atomic force microscope. Acta Optica Sinica, 20, 1533-1537(2000).

[68] P J Caber. Interferometric profiler for rough surfaces. Applied Optics, 32, 3438-3441(1993).

[69] Xiaozhou Li, Huadong Yu, Zhanjiang Yu, et al. Optical inspection method for surface defects of micro-components. Acta Armamentarii, 32, 872-877(2011).

[70] Hongliang Zhang, Qin Wang. Interferometer and its application in optical detection. Science and Technology Information, 79, 114(2007).

[71] Chen Liu, Rongsheng Lu, Lei Chen, et al. Research progress of surface roughness measurement based on optical method. Semiconductor Optoelectronics, 31, 495-500(2010).

[72] Guichun Chi, Zhaofei Zhou, Weidong Zhou. Development of laser interference profilometry. Modern Scientific Instruments, 33-35(1996).

[73] Xuanyang Wang, Guang Chen. Detection and control of surface defects of ultra smooth optical elements. Optics and Optoelectronic Technology, 16, 52-57(2018).

[74] Qun Hao, Yan Ning, Yao Hu. Interferometric testing of aspheric surface. Metrology and Measurement Technology, 38, 1-8(2018).

[75] Yongying Yang, Yongmo Zhuo, Min Xu. The system on real-time scanning and data treating of the double focus laser interference spherical profilometer. Optical Instruments, 26-33(1994).

[76] Yongying Yang, Yongmo Zhuo, Min Xu. Laser double focus interference spherical micro profilometer. Modern Scientific Instruments, 36-38, 40(1995).

[77] Zheng You, Zhu Li. A non-contact light heterodyne profilometer. Journal of Astronautic Metrology and Measurement, 17-21(1992).

[78] Jeong Seok Oh, Seung-Woo Kim. Femtosecond laser pulses for surface-profile metrology. Optics Letters, 30, 2650-2652(2005).

[79] L Deck, Groot P de. High-speed noncontact profiler based on scanning white-light interferometry. Applied Optics, 33, 7334-7338(1994).

[80] [80] David Grigg, Eric Felkel, John Roth, et al. Static dynamic acterization of MEMS MOEMS devices using optical interference microscopy[C]Proceedings of SPIE, 2004, 5455: 429435.

[81] Rong Dai, Tiebang Xie, Suping Chang. A vertical scanning white-light interfering profilometer. Optical Technique, 32, 545 - 547, 552(2006).

[82] [82] Li Ping. Surface topography evaluation err compensation based on white light interferometry [D]. Dalian: Dalian University of Technology, 2021. (in Chinese)

[83] Hui Feng, Boxin Wei, Lusheng Liu, et al. Study on the application of white light interferometer in metal material surface testing. Optics and Optoelectronic Technology, 18, 80-85(2020).

[84] [84] Wang Shitong. Theetical modeling system analysis of scattering imaging f precision surface defect detection [D]. Hangzhou: Zhejiang University, 2015. (in Chinese)

[85] P E Klingsporn. Determination of the diameter of an isolated surface defect based on Fraunhofer diffraction. Applied Optics, 19, 1435-1438(1980).

[86] Yongjun Wu, Wenxi Bai. Defects inspection of optical, surface by recognizing laser diffraction patterns. Optical Technique, 4-6(1996).

[87] Guilin Wang, Junhui Zhu, Jiaxiang Li, et al. In situ detection and evaluation of surface defects for large-aperture optical elements. Journal of Applied Optics, 40, 1167-1173(2019).

[88] [88] Hauptvogel M, Schröder S, Herffurth T, et al. Light scattering techniques f the acterization of optical components[C]International Conference on Space Optics, 2017, 10563: 1056347.

[89] Yongying Yang, Xin Gao, Bing Xiao, et al. Optical micro imaging and digital evaluation system for super smooth surface defects. Infrared and Laser Engineering, 39, 325-329(2010).

[90] Yongying Yang, Chunhua Lu, Jiao Liang, et al. Microscopic dark-field scattering imaging and digitalization evaluation system of defects on optical devices precision surface. Acta Optica Sinica, 27, 1031-1038(2007).

[91] Yongying Yang, Yongmo Zhuo, Mingjian Yang. Optical profilometer for nondestructive testing of ultra smooth surfaces. Opto-Electronic Engineering, 12-16(1999).

[92] [92] Zhang Jianpu. Research on key technologies of subsurfacebulk defect detection of fused silica optical elements [D]. Hangzhou: Zhejiang University, 2020. (in Chinese)

[93] [93] Lu An. Research on two channel image acquisition system f subsurface defects of large aperture optical elements [D]. Hangzhou: Zhejiang University, 2021. (in Chinese)

[94] [94] Wang Yue. Research on automatic leveling focusing f subsurface defect detection of optical elements [D]. Hangzhou: Zhejiang University, 2020. (in Chinese)

[95] Jianpu Zhang, Huanyu Sun, Shiling Wang, et al. Three-dimensional reconstruction technology of subsurface defects in fused silica optical components. Acta Optica Sinica, 40, 0216001(2020).

[96] [96] Li Chengrui. Research on surface defect detection technology of curved optical element [D]. Chengdu: University of Electronic Science Technology, 2020. (in Chinese)

[97] A Greponev, E N Grebinyuk, A Д Wittman, et al. Automatic inspection of optical part defects. Optical Technique, 20-22(1988).

[98] Lulu Wang, Aihua Gao, Weiguo Liu, et al. Angular resolution space laser scattering measurement system based on LabVIEW. Optics and Optoelectronic Technology, 16, 40-45(2018).

[99] Cong Huang, Kepeng Zhang, Xiang Wang, et al. Method for surface quality inspection based on total scattering measurement. Acta Optica Sinica, 39, 0712005(2019).

[100] [100] Pezzaniti J L, Hadaway J B, Chipman R A, et al. Total integrated scatter instrument f inspace moniting of surface degradation[C]Proceedings of SPIE, 1990, 1329: 200210.

[101] Haihong Hou. Light scattering measurement method of optical surface. Journal of Changshu Institute of Technology, 46-50(2008).

[102] G Stefan, S Jörg, D Angela. Light-scattering measurements of optical thin-film components at 157 and 193 nm. Applied Optics, 41, 3224-3235(2002).

[103] J Krč, M Zeman, O Kluth, et al. Effect of surface roughness of ZnO: Al films on light scattering in hydrogenated amorphous silicon solar cells. Thin Solid Films, 426, 296-304(2003).

[104] K H Guenther, H L Gruber, H K Pulker. Morphology and light scattering of dielectric multilayer systems. Thin Solid Films, 34, 363-367(1976).

[105] Jean M Bennett. Comparison of techniques for measuring the roughness of optical surfaces. Optical Engineering, 24, 243380(1985).

[106] A Duparré, S Kassam. Relation between light scattering and the microstructure of optical thin films. Applied Optics, 32, 5475-5480(1993).

[107] C Amra, C Grezes-Besset, P Roche, et al. Description of a scattering apparatus: application to the problems of characterization of opaque surfaces. Applied Optics, 28, 2723-2730(1989).

[108] J M Elson, J P Rahn, J M Bennett. Light scattering from multilayer optics: comparison of theory and experiment. Applied Optics, 19, 669-679(1980).

[109] Xiao Zhang, Guoguang Yang, Shangyi Cheng, et al. Laser spectrum analysis method of optical surface defects and its automatic detector. Chinese Journal of Scientific Instrument, 396-399(1994).

[110] [110] Buchtel M E. Virtual image superposing comparat[C]Proceedings of SPIE, 1993, 1821: 130151.

[111] L R Baker. Inspection of surface flaws by comparator microscopy. Applied Optics, 27, 4620-4625(1988).

[112] [112] Baker L R. Onmachine measurement of roughness, waviness, flaws[C]Proceedings of SPIE, 1990, 1333: 248256.

[113] R Cormack, K M Johnson, Lin Zhang, et al. Optical inspection of manufactured glass using adaptive fourier filtering. Optical Engineering, 27, 275358(1988).

[114] [114] Liu Jiang. Research on key technologies of spherical aspheric surface defect detection [D]. Changchun: Graduate School of Chinese Academy of Sciences (Changchun Institute of Optics, Precision Mechanics Physics), 2016. (in Chinese)

[115] [115] Druy M A, Bolduc R A. Fiber optic noncontact reflectance probe f detection of contamination in pharmaceutical mixing vessels[C]Proceedings of SPIE, 1999, 3538: 167171.

[116] [116] Ma Yun. Research on dynamic detection method of phase defects of optical elements [D]. Nanjing: Nanjing University of Science Technology, 2019. (in Chinese)

[117] W J Choi, S Y Ryu, J K Kim, et al. Fast mapping of absorbing defects in optical materials by full-field photothermal reflectance microscopy. Optics Letters, 38, 4907-4910(2013).

[118] [118] Zhao Limin. Research on quantitative detection technology of surface defects based on machine vision [D]. Hangzhou: Zhejiang University, 2016. (in Chinese)

[119] [119] Lu Guoping. Research on inspection system of large aperture curved optical element surface defect image processing [D]. Harbin: Harbin Institute of Technology, 2018. (in Chinese)

[120] [120] Truckenbrodt H, Duparre A, Schuhmann U. Roughness defect acterization of optical surfaces by lightscattering measurements [C]Proceedings of SPIE, 1993, 1781: 139151.

[121] [121] Yamane T, Tanaka T, Terasawa T, et al. Phase defect analysis with actinic fullfield EUVL mask blank inspection[C]Proceedings of SPIE, 2011, 8166: 4.

[122] Bin Zhang, Chanlao Liu. Research on automatic detection technology for spherical optical element surface defect. Optical Instruments, 35, 16-20(2013).

[123] Fanyi Wang, Yongying Yang, Weiming Lou. Fast path planning algorithm for large-aperture aspheric optical elements based on minimum object depth and a self-optimized overlap coefficient. Applied Optics, 61, 3123-3133(2022).

[125] Chengcheng Su, Xinjun Wan, Hongdou Chen, et al. Research on mirror defect detection technology combining curvature and dark field imaging. Optical Instruments, 43, 1-8(2021).

[126] Bin Ma, Zhengxiang Shen, Pengfei He, et al. Detection of subsurface defects of fused silica optics by confocal scattering microscopy. Chinese Optics Letters, 8, 296-299(2010).

[127] Ailing Tian, Huiting Wang, Juanjuan Dang, et al. Study on subsurface damage detection method of polished surface. Acta Photonica Sinica, 42, 214-218(2013).

[128] Qian Bai, Hao Ma, Jingfei Yin. Polarized laser confocal technique for subsurface damage of lapped quartz glass. Optics and Precision Engineering, 29, 1795-1803(2021).

[129] S H Lu, H Hua. Structured illumination assisted microdeflec-tometry with optical depth scanning capability. Optics Letters, 41, 4114-4117(2016).

[130] [130] Sheehan L M, Kozlowski M R, Camp D W. Application of total internal reflection microscopy f laser damage studies on fused silica[C]Proceedings of SPIE, 1998, 3244: 282295.

[131] P A Temple. Total internal reflection microscopy: a surface inspection technique. Applied Optics, 20, 2656-2664(1981).

[132] O W Fähnle, T Wons, E Koch, et al. iTIRM as a tool for qualifying polishing processes. Applied Optics, 41, 4036-4038(2002).

[133] [133] Conder A, Alger T, Azevedo S, et al. Final optics damage inspection (FODI) f the National Ignition Facility[C]Preceedings of SPIE, 2007, 6720: 672010.

[134] [134] Cheng Jie. Research on nondestructive testing technology of surface defects of mirr objects based on fringe reflection method [D]. Xiangtan: Xiangtan University, 2019. (in Chinese)

[135] Wenchuan Zhao, Xianyun Zhong, Bin Liu. Optical surface defect detection method based on fringe reflection. Acta Photonica Sinica, 43, 0912007(2014).

[136] [136] Man Yuchun. Research on aspheric surface detection technology based on digital moire fringe [D]. Changchun: University of Chinese Academy of Sciences (Changchun Institute of Optics, Precision Mechanics Physics, Chinese Academy of Sciences), 2011. (in Chinese)

[137] [137] Perard D, Beyerer J. Threedimensional measurement of specular freefm surfaces with a structuredlighting reflection technique[C]Proceedings of SPIE, 1997, 3204: 7480.

[138] H Lei, N C Seng, A K Asundi. Dynamic three-dimensional sensing for specular surface with monoscopic fringe reflectometry. Optics Express, 19, 12809-12814(2011).

[139] [139] Petz M, Ritter R. Reflection grating method f 3D measurement of reflecting surfaces[C]Proceedings of SPIE, 2001, 4399: 3541.

[140] [140] Knauer M C, Kaminski J, Hausler G. Phase measuring deflectometry: a new approach to measure specular freefm surfaces[C]Proceedings of SPIE, 2004, 5457: 366376.

[141] [141] Bothe T, Li Wansong, von Kopylow C, et al. Highresolution 3D shape measurement on specular surfaces by fringe reflection[C]Proceedings of SPIE, 2004, 5457: 411422.

[142] [142] Petz M, Tutsch R. Reflection grating photogrammetry: a technique f absolute shape measurement of specular freefm surfaces[C]Proceedings of SPIE, 2005, 5869: 58691D.

[143] [143] Su Peng, Wang Shanshan, Khreishi Manal, et al. SCOTS: a reverse Hartmann test with high dynamic range f Giant Magellan Telescope primary mirr segments [C]Proceedings of SPIE, 2012, 8450: 84500W.

[144] Xianyu Su, Guanshen Zhang, Zexian Chen, et al. Photoelectric automatic measurement system for three-dimensional surface shape of shoe last. Optical Engineering, 1-5(1989).

[145] Xianyu Su, Wensen Zhou, Bally G von, et al. Automated phase-measuring profilometry using defocused projection of a Ronchi grating. Optics Communications, 94, 561-573(1992).

[146] Z Y Chen, W C Zhao, Q C Zhang, et al. Shape measurement of stressed mirror based on stereoscopic phase measuring deflectometry. Opto-Electronic Engineering, 47, 84-92(2020).

[147] Xianyu Su. Three dimensional (digital) imaging based on the concept of equivalent light wave. Journal of Optoelectronics·Laser, 11, 330(2000).

[148] Yan Tang, Xianyu Su, Song Hu. Measurement based on fringe reflection for testing aspheric optical axis precisely and flexibly. Applied Optics, 50, 5944-5948(2011).

[149] Xianyu Su, Qican Zhang, Wenjing Chen. Three-dimensional imaging based on structured illumination. Chinese Journal of Lasers, 41, 0209001(2014).

[150] Yan Tang, Xianyu Su, Yuankun Liu, et al. 3D shape measurement of the aspheric mirror by advanced phase measuring deflectometry. Optics Express, 16, 15090-15096(2008).

[151] Yan Tang, Xianyu Su, Fan Wu, et al. A novel phase measuring deflectometry for aspheric mirror test. Optics Express, 17, 19778-19784(2009).

[152] Yan Tang, Xianyu Su, Yuankun Liu, et al. Three-dimensional shape measurement of aspheric mirror based on fringe reflection. Acta Optica Sinica, 29, 965-969(2009).

[153] Wenchuan Zhao, Xianyu Su, Yuankun Liu, et al. Testing an aspheric mirror based on phase measuring deflectometry. Chinese Journal of Lasers, 37, 1338-1341(2010).

[154] Wenchuan Zhao, Bin Fan, Fan Wu, et al. Experimental analysis of reflector test based on phase measuring deflectometry. Acta Optica Sinica, 33, 98-101(2013).

[155] Cong Zhu, Guangting Yu, Bolin Li, et al. A new method for measuring the surface defect width of precision optical lenses. Computer Applications and Software, 31, 259-261, 286(2014).

[156] [156] Song Yiping. Research on threedimensional surface shape detection method of mobile phone glass cover based on stripe reflection [D]. Chengdu: University of Electronic Science Technology, 2019. (in Chinese)

[157] Yiyang Huang, Jie Wang, Yiping Song, et al. A novel defect detection method with eliminating dust for specular surfaces based on structured-light modulation analysis technique. Optics and Laser Technology, 141, 107089(2021).

[158] Wei Wang, Jie Wang, Yiyang Huang, et al. Surface defect detection in transparent objects using polarized transmission structured light. Acta Optica Sinica, 41, 1812002(2021).

[159] [159] Zhou Zheng. Research on optical acterization of graphene based on phase measurement deflection [D]. Chengdu: University of Electronic Science Technology, 2019. (in Chinese)

[160] [160] Wu Yuxiang. Research on surface quality detection method of mirr object based on optical threedimensional imaging [D]. Chengdu: University of Electronic Science Technology, 2017. (in Chinese)

[161] Ying Sun, Luhua Fu, Zhong Wang. A fast detection algorithm for ceramic ball surface defects based on fringe reflection. Journal of Measurement Science and Instrumentation, 11, 28-37(2020).

[162] [162] Zhang Kai. Research on key technologies of visual inspection of ceramic ball surface defects [D]. Tianjin: Tianjin University, 2017. (in Chinese)

[163] Meihua Jiang, Luhua Fu, Zhong Wang, et al. A new method for specular curved surface defect inspection based on reflected pattern integrity. Journal of Measurement Science and Instrumentation, 7, 221-228(2016).

[164] Yuhang Song, Zhong Wang, Luhua Fu, et al. A method for detecting reflection fringes of surface defects on highly reflective surfaces. Mechanical Science and Technology for Aerospace Engineering, 36, 1250-1254(2017).

[165] Mingzhou Chen, Zhong Wang, Xinyu Kou, et al. Non-contact nondestructive testing method of 3D curved surface based on vision technology. Nondestructive Testing, 23, 372-374, 413(2001).

[166] Shuo Jiang, Linghui Yang, Yongjie Ren, et al. Defect detection in mirror-like object surface based on phase deflection. Laser and Optoelectronics Progress, 57, 031201(2020).

[167] [167] Zhu Ronggang, Zhu Rihong, Song Qian, et al. Specular surface measurement based on fringe reflection study on 3D shape reconstruction technique[C]Proceedings of SPIE, 2013, 8769: 87692S.

[168] [168] Yuan Ting. Research on the detection technology of large aperture aspheric surface reflection based on fringe reflection [D]. Changchun: University of Chinese Academy of Sciences (Changchun Institute of Optics, Precision Mechanics Physics, Chinese Academy of Sciences), 2016. (in Chinese)

[169] [169] Wan Xinjun, Bin Boyi, Xie Shuping, et al. Development of an integrated freefm optics measurement system based on phase measuring deflectometry[C]Proceedings of SPIE, 2018, 10847: 1084710.

[170] C F Guo, A D Hu. Three-dimensional shape measurement of aspheric mirrors with null phase measuring deflectometry. Optical Engineering, 58, 104102(2019).

[171] Tao Tao, Hongwei Guo, Haitao He. Overview of optical three-dimensional measurement technique for specular reflection surfaces. Optical Instruments, 27, 90-95(2005).

[172] Wenchuan Zhao, Min Zhou, Haitao Liu, et al. The off-axis aspheric mirror testing based on the fringe reflection technique. Opto-Electronic Engineering, 45, 32-39(2018).

[173] Cen Dai, Yan Ging, Hao Zhang, et al. Detection system of multilayer coating microstructure defects based on differential interference contrast confocal microscopy. Chinese Optics, 11, 255-264(2018).

[174] M Duncan, M Bashkansky, J Reintjes. Subsurface defect detection in materials using optical coherence tomography. Optics Express, 13, 540-545(1998).

[175] [175] Savvy Inspect. Savvy Inspect Technical Specification[EBOL]. [20200420]. http:www.savvyoptics.comSavvyInspectTM.html.

[176] [176] DIOPTIC. ARGOS–Optical surface inspection[EBOL]. [20200420]. https:www.dioptic.deenargosen.