Current situation and development trend of aspheric optical surface defect detection technology (<i>invited</i>)

Mingze Li; Xi Hou; Wenchuan Zhao; Hong Wang; Mengfan Li; Xiaochuan Hu; Yuancheng Zhao; Yang Zhou

doi:10.3788/IRLA20220457

Infrared and Laser Engineering, Volume. 51, Issue 9, 20220457(2022)

Current situation and development trend of aspheric optical surface defect detection technology (invited)

Mingze Li^1,2, Xi Hou¹, Wenchuan Zhao¹, Hong Wang^1,2, Mengfan Li¹, Xiaochuan Hu¹, Yuancheng Zhao¹, and Yang Zhou¹

Author Affiliations

¹Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China

²University of Chinese Academy of Sciences, Beijing 100049, China

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Figures & Tables(15)

Fig. 1. (a) ISO, GB standards; (b) Defect standard plate drawings(scratches and digs)

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Fig. 2. Detection principle of interferometry

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Fig. 3. Imaging method^{[23,30,49,56,134]}

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Fig. 4. Fringe reflection method. (a) Schematic diagram of measurement principle^[134]; (b) Diagram of experimental device^[168]; (c) Flow chart of detection^[135]

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Fig. 5. Development history of fringe reflection method^[136-153]

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Fig. 6. Surface defect detection instruments^{[38,52,175-177]}. (a) Savvy Inspector TM SIL-4; (b) ARGOS₂; (c) horos; (d) Zhichang photoelectric automatic defect detection system; (e) Large aperture element defect detector of Zhejiang University; (f) Large aperture optical glass detection device of Institute of Automation, Chinese Academy of Sciences; (g) Surface defect detection device of Institute of Optics and Electronics, Chinese Academy of Sciences

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Table 1. Typical surface defect type^[12,22-29]

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Table 1. Typical surface defect type^[12,22-29]

Defect type	Dig	Scratch	Broken edge	Bubble
Appearance
ISO 10110-7	Length<2 mm	Long scratch length>2 mm	Description requirements to be met	Gas not discharged in time during production and processing
GB/T 1185-2006	Rough pockmarks corresponding to basic series of tolerance	Aspect ratio of long scratches>160:1	Description requirements to be met	Gas not discharged in time during production and processing
MIL-PRF-13830 B	A maximum size pockmark is allowed in the 20 mm area	Maximum size: total scratch length≤One quarter of the element diameter	Ignored when not entering the effective aperture	One is allowed in the area with optical diameter of 20 mm

Table 2. Surface defect detection methods^[59-174]

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Table 2. Surface defect detection methods^[59-174]

Test method			Advantage	Disadvantage	Defect information
Contact type	Scanning probe surface profilometer; Atomic force microscope		Up to pm level vertical resolution	Slow speed, not suitable for large diameter components	3D
Non contact type	Interference method	Laser/White light interferometer	Vertical resolution up to 0.1 nm	Complex fringe demodulation and low lateral resolution	3D
		Differential interference difference	High resolution	Complex technical design	3D
		Optical coherence chromatography	Good depth resolution	Low horizontal resolution	3D
	Diffraction method		Simultaneously detect the defect type and size	Not universal	2D
	Scattering method	Visual method	Simple and fast operation	Low accuracy and great subjective influence	2D
		Virtual image superposition comparison method	Higher accuracy than visual method	Great subjective influence	2D
		Filtering imaging detection method	Fast	Low resolution	2D
		Infrared detection method	Easy	Low accuracy, affected by environment	1D
		Dark field scattering imaging	The results are intuitive and have good contrast	It needs splicing detection and takes a long time	2D
		Bright field scattering imaging	The results are intuitive and the resolution is high	Slow	2D
Non contact type	Scattering method	Laser scattering confocal microscopy	Clear imaging and high system resolution	Complex device and low efficiency	3D
		Photothermal deflection microscopy	High accuracy	Low efficiency	3D
		Total internal reflection method	The obtained dark field image is easy to process	Small imaging space angle	3D
		Fringe reflection method	Simple device and high sensitivity	Suitable for small area measurement	3D
		Scattered light energy analysis method	The scattering characteristics of defects are obtained accurately	The location and number of defects cannot be accurately obtained.	2D
		Laser spectrum analysis	The device is simple and easy to operate	Disturbed by defective deep structure	2D

Table 3. Aspheric surface defect detection methods^[59-174]

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Table 3. Aspheric surface defect detection methods^[59-174]

Test method				Scope of application		Sketch map
Contact type	Scanning probe surface profilometer; Atomic force microscope			It is difficult to detect high steepness and large-size curved surface components; It needs to be customized when testing aspheric surfaces
Non contact type	Interference method	Interference microscope; Laser interference profilometer; White light interferometer		It is mainly used for small and medium diameter and steep curved surface components
	Diffraction method	Diffraction pattern method		It is mainly used for aspheric surface defects with regular morphology
	Scattering method	Imaging method	Visual method	Low detection accuracy of aspheric surface defects.
	Scattering method	Imaging method	Laser scattering confocal microscopy	It is difficult to detect the surface defect of complex surface
Non contact type	Scattering method	Imaging method	Bright field /Dark field scattering imaging	It is mainly used for two- dimensional inspection of aspheric surface defects
		Imaging method	Fringe reflection method	Three dimensional inspection of aspheric surface defects
		Non imaging method	Scattered light energy analysis method	Total integral scattering method	It is difficult to determine the location and size of defects
			Scattered light energy analysis method	Angular resolution scattering method
			Laser spectrum analysis	It is often used for aspheric defects with regular structure

Table 4. Detection of defects with different morphologies by diffraction pattern method^[86]
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Table 4. Detection of defects with different morphologies by diffraction pattern method^[86]
Diffraction pattern method Linear scratch Dig Bubble
Light diffraction pattern

Table 5. Principle of surface defect detection by scattering method under different modes
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Table 5. Principle of surface defect detection by scattering method under different modes
Mode Non-defective Defective
Bright field scattering imaging (coaxial)
Dark field scattering imaging (off-axial)

Table 6. Non imaging defect detection methods^[98-109]

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Table 6. Non imaging defect detection methods^[98-109]

	Scattered light energy analysis		Laser spectrum analysis
Method	Total integral scattering method	Angle resolved scattering spectroscopy	Laser spectrum analysis
Sketch Map
Principle	An integrating sphere is used to collect the scattered light from the surface of the optical element and integrate the energy	The light intensity and its distribution of scattered light are used to measure the surface roughness parameters.	The intensity distribution of backscattered light from surface defects of different structures was detected and evaluated.
Feature	Simple structure, fast measurement speed, not easily affected by the environment; However, it is impossible to accurately obtain all the characteristic information of defects and the spatial distribution of scattered light	The spatial distribution of scattered light and the total surface integrated scattering value can be obtained accurately; However, the structure is complex, the cost is high, and it is easy to be affected by the environment	Simple structure and easy operation; However, it is easy to be disturbed by the deep structure of defects and difficult to achieve the balance between scanning efficiency and accuracy

Table 7. Research on bright field /dark field scattering imaging^{[44,49,120-125]}

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Table 7. Research on bright field /dark field scattering imaging^{[44,49,120-125]}

Team	Main achievements	Sketch map
University of Jena Horst	A device for measuring the scattered light distribution of different defects is designed. The height distribution of defects is obtained by contour measurement, and the automatic detection of defects is realized
Japan Extreme Ultraviolet Lithography Infrastructure Development Center	A photochemical full field detection system is proposed to measure the phase defects of 20 nm in the transverse direction and 1.1 nm in the longitudinal direction
Xi'an Technological University	The light source is incident at an angle of 40°-60°
Zhejiang University	Based on the dark field illumination mode, a curved surface defect detection device using a high brightness variable aperture angle LED ring light source has an imaging resolution of 8 μm
Sichuan University	Circular aperture microscopy (CAM) was proposed
Shanghai University of Technology	Combining dark field scattering and curvature imaging to realize comprehensive detection of optical surface defects
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences	Using the bright field illumination scheme, a dark field illumination experimental device was built using two laser diodes to detect the surface defects of concave spherical mirrors
Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences	A high-speed laser line scanning surface defect detection device with high sensitivity and signal-to-noise ratio is developed for large caliber and heavy weight samples
Institute of Optics and Electronics, Chinese Academy of Sciences	A defect detection device for 150 mm curved surface optical element is developed, which can detect weak scratches

Table 8. Research on laser scattering confocal microscopy^[126-128]

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Table 8. Research on laser scattering confocal microscopy^[126-128]

Team	Main achievements	Sketch map
Tongji University	The light scattering method is combined with laser confocal scanning to quickly distinguish micro cracks and scratches
Xi'an Technological University	It combines optical confocal imaging, tomography, micro optics, optical scattering and weak signal processing to realize quantitative and non-destructive detection of optical element defects
Dalian University of Technology	The polarization laser scattering method and the laser scattering confocal method are combined to obtain the three-dimensional defect information by changing the different positions of the focus of the micro objective lens in the element to be measured

Table 9. Multi channel detection of surface defects by fringe reflection method^[135]
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Table 9. Multi channel detection of surface defects by fringe reflection method^[135]
Light intensity Gradient Defect depth measurement
Horizontal
Vertical

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Mingze Li, Xi Hou, Wenchuan Zhao, Hong Wang, Mengfan Li, Xiaochuan Hu, Yuancheng Zhao, Yang Zhou. Current situation and development trend of aspheric optical surface defect detection technology (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220457

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Paper Information

Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface

Received: Jun. 30, 2022

Accepted: --

Published Online: Jan. 6, 2023

The Author Email:

DOI:10.3788/IRLA20220457

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Typical surface defect type[12,22-29]

Table 1. Typical surface defect type[12,22-29]

Table 2. Surface defect detection methods[59-174]

Table 2. Surface defect detection methods[59-174]

Table 3. Aspheric surface defect detection methods[59-174]

Table 3. Aspheric surface defect detection methods[59-174]

Table 4. Detection of defects with different morphologies by diffraction pattern method[86]

Table 4. Detection of defects with different morphologies by diffraction pattern method[86]

Table 5. Principle of surface defect detection by scattering method under different modes

Table 5. Principle of surface defect detection by scattering method under different modes

Table 6. Non imaging defect detection methods[98-109]

Table 6. Non imaging defect detection methods[98-109]

Table 7. Research on bright field /dark field scattering imaging[44,49,120-125]

Table 7. Research on bright field /dark field scattering imaging[44,49,120-125]

Table 8. Research on laser scattering confocal microscopy[126-128]

Table 8. Research on laser scattering confocal microscopy[126-128]

Table 9. Multi channel detection of surface defects by fringe reflection method[135]

Table 9. Multi channel detection of surface defects by fringe reflection method[135]

Table 1. Typical surface defect type^[12,22-29]

Table 1. Typical surface defect type^[12,22-29]

Table 2. Surface defect detection methods^[59-174]

Table 2. Surface defect detection methods^[59-174]

Table 3. Aspheric surface defect detection methods^[59-174]

Table 3. Aspheric surface defect detection methods^[59-174]

Table 4. Detection of defects with different morphologies by diffraction pattern method^[86]

Table 4. Detection of defects with different morphologies by diffraction pattern method^[86]

Table 6. Non imaging defect detection methods^[98-109]

Table 6. Non imaging defect detection methods^[98-109]

Table 7. Research on bright field /dark field scattering imaging^{[44,49,120-125]}

Table 7. Research on bright field /dark field scattering imaging^{[44,49,120-125]}

Table 8. Research on laser scattering confocal microscopy^[126-128]

Table 8. Research on laser scattering confocal microscopy^[126-128]

Table 9. Multi channel detection of surface defects by fringe reflection method^[135]

Table 9. Multi channel detection of surface defects by fringe reflection method^[135]