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Semiconductor Optoelectronics, Volume. 43, Issue 3, 517(2022)

Effect of ScAlN Buffer Layer Thickness on GaN Epitaxial Layer on Si(100) Substrate

YIN Haotian1... DING Guangyu1, HAN Jun2, XING Yanhui1 and DENG Xuguang3 |Show fewer author(s)
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    YIN Haotian, DING Guangyu, HAN Jun, XING Yanhui, DENG Xuguang. Effect of ScAlN Buffer Layer Thickness on GaN Epitaxial Layer on Si(100) Substrate[J]. Semiconductor Optoelectronics, 2022, 43(3): 517

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    Special Issue:

    Received: Jan. 28, 2022

    Accepted: --

    Published Online: Aug. 1, 2022

    The Author Email:

    DOI:10.16818/j.issn1001-5868.2022012802

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology