[1] YANG Z J, BAI Y D, CHEN X et al. The residual vibration impact on the multiple target positioning time for array operation[C], 50-55(2016).

[2] AGUILAR I H, SIDOBRE D. On-line trajectory planning of robot manipulator ’ s end effector in Cartesian Space using quaternions[J]. Contract, 1-10(2006).

[3] [3] 3杨亮亮， 许守金， 史伟民， 等. 基于牛顿迭代法的S形加减速时间算法研究［J］. 中国机械工程， 2015， 26（7）： 912-916， 942. doi: 10.3969/j.issn.1004-132X.2015.07.010YANGL L， XUSH J， SHIW M， et al. Research on algorithm of sshape acceleration and deceleration time based on Newton iterative method［J］. China Mechanical Engineering， 2015， 26（7）： 912-916， 942. （in Chinese）. doi: 10.3969/j.issn.1004-132X.2015.07.010

[4] BAI Y D, CHEN X, SUN H et al. Time-optimal freeform S-curve profile under positioning error and robustness constraints[J]. IEEE/ASME Transactions on Mechatronics, 23, 1993-2003(2018).

[5] [5] 5马天兵， 周青， 杜菲， 等. 基于机器视觉和改进PID的压电柔性机械臂振动控制［J］. 光学 精密工程， 2020， 28（1）： 141-150. doi: 10.3788/ope.20202801.0141MAT B， ZHOUQ， DUF， et al. Piezoelectric flexible manipulator vibration control based on machine vision and improved PID［J］. Opt. Precision Eng.， 2020， 28（1）： 141-150. （in Chinese）. doi: 10.3788/ope.20202801.0141

[6] [6] 6付云博， 郭同健. 基因测序仪运动平台的高精度定位控制［J］. 光学 精密工程， 2018， 26（10）： 2455-2462. doi: 10.3788/ope.20182610.2455FUY B， GUOT J. High-precision position control of a gene sequencer motion stage［J］. Opt. Precision Eng.， 2018， 26（10）： 2455-2462. （in Chinese）. doi: 10.3788/ope.20182610.2455

[7] GARCÍA-MARTÍNEZ J R, RODRÍGUEZ-RESÉNDIZ J, CRUZ-MIGUEL E E. A new seven-segment profile algorithm for an open source architecture in a hybrid electronic platform[J]. Electronics, 8, 652(2019).

[8] [8] 8祁超， 谢馨， 陈凌宇， 等. 精密转台S曲线轨迹规划及高精度控制［J］. 光学 精密工程， 2018， 26（12）： 2971-2981. doi: 10.3788/OPE.20182612.2971QICH， XIEX， CHENL Y， et al. S-curve trajectory planning and high-precision control of precision servo turntable［J］. Opt. Precision Eng.， 2018， 26（12）： 2971-2981. （in Chinese）. doi: 10.3788/OPE.20182612.2971

[9] [9] 9赵新华， 刘培昌， 赵磊， 等. 大范围平动并联机器人运动学解耦与速度自适应规划［J］. 光学 精密工程， 2021， 29（2）： 305-315. doi: 10.37188/OPE.20212902.0305ZHAOX H， LIUP CH， ZHAOL， et al. Kinematic decoupling and velocity adaptive planning［J］. Opt. Precision Eng.， 2021， 29（2）： 305-315. （in Chinese）. doi: 10.37188/OPE.20212902.0305

[10] YOON H J, CHUNG S Y, KANG H S et al. Trapezoidal motion profile to suppress residual vibration of flexible object moved by robot[J]. Electronics, 8, 30(2019).

[11] KIM J M. A trapezoidal velocity profile generator for position control using a feedback strategy[J]. Energies, 12, 1222(2019).

[12] LEE D. Optimization process for polynomial motion profiles to achieve fast movement with low vibration[J]. IEEE Transactions on Control Systems Technology, 28, 1892-1901(2020).

[13] [13] 13刘扭扭. 超高加速精密运动平台残余振动的主动控制方法研究［D］. 哈尔滨： 哈尔滨工业大学， 2013. doi: 10.14257/astl.2013.29.94LIUN N. Research on Active Control Method of High Acceleration and High Precision Motion Platform’s Residual Vibration［D］. Harbin： Harbin Institute of Technology， 2013. （in Chinese）. doi: 10.14257/astl.2013.29.94

[14] BROQUERE X, SIDOBRE D, HERRERA-AGUILAR I. Soft motion trajectory planner for service manipulator robot[C], 2808-2813(2008).

[15] [15] 15方佳伟， 蔡锦达， 姚莹， 等. 基于Sigmoid函数的S型加减速控制方法研究［J］. 机电工程， 2018， 35（9）： 933-938. doi: 10.3969/j.issn.1001-4551.2018.09.006FANGJ W， CAIJ D， YAOY， et al. S-type acceleration and deceleration control method based on Sigmoid-function［J］. Journal of Mechanical & Electrical Engineering， 2018， 35（9）： 933-938. （in Chinese）. doi: 10.3969/j.issn.1001-4551.2018.09.006

[16] LI H Z, LE M D, GONG Z M et al. Motion profile design to reduce residual vibration of high-speed positioning stages[J]. IEEE/ASME Transactions on Mechatronics, 14, 264-269(2009).

[17] HUANG P F, XU Y S, LIANG B. Global minimum-jerk trajectory planning of space manipulator[J]. International Journal of Control, 4, 405-413(2006).

[18] LIU H S, LAI X B, WU W X. Time-optimal and jerk-continuous trajectory planning for robot manipulators with kinematic constraints[J]. Robotics and Computer-Integrated Manufacturing, 29, 309-317(2013).

[19] KANG C G. Performance measure of residual vibration control[J]. Journal of Dynamic Systems, 133(2011).

[20] ZHANG Y N, HE L Y, LUO J W et al. Complete framework of jerk-level inverse-free solutions to inverse kinematics of redundant robot manipulators[C], 4717-4722(2016).

[21] FANG Y, HU J, LIU W H et al. Smooth and time-optimal S-curve trajectory planning for automated robots and machines[J]. Mechanism and Machine Theory, 137, 127-153(2019).

[22] LI H Z, GONG Z M, LIN W et al. Motion profile planning for reduced jerk and vibration residuals[webpage](2007). http：//cfile25.uf.tistory.com/attach/167811264CAEC38A136E4C

[23] LU T C, CHEN S L. Genetic algorithm-based S-curve acceleration and deceleration for five-axis machine tools[J]. The International Journal of Advanced Manufacturing Technology, 87, 219-232(2016).

[24] BORYGA M, GRABOŚ A. Planning of manipulator motion trajectory with higher-degree polynomials use[J]. Mechanism and Machine Theory, 44, 1400-1419(2009).

[25] NGUYEN K D, CHEN I M. On algorithms for planning S-curve motion profiles[J]. International Journal of Advanced Robotic Systems, 5, 11(2008).