Optics and Precision Engineering, Volume. 29, Issue 10, 2400(2021)

Optimal order polynomial motion profile for high-precision flexible scanning platform

Long-hui LI1...3, Zhi-qi ZHANG2,3, Zhen GUO2,3, Yuan-yuan LUO2,3, Lian-qun ZHOU1,2,3,*, and Jia YAO34,* |Show fewer author(s)
Author Affiliations
  • 1School of Mechanical and Electrical Engineering,Changchun University of Science and Technology, Changchun30022, China
  • 2University of Science and Technology of China, Hefei3006, China
  • 3Key Laboratory of Bio-medical Diagnosis, Chinese Academy of Sciences,Suzhou Institute of Biomedical Engineering and Technology,Chinese Academy of Sciences, Suzhou21516, China
  • 4School of Electronic and Information Engineering, Soochow University, Suzhou215006, China
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    Long-hui LI, Zhi-qi ZHANG, Zhen GUO, Yuan-yuan LUO, Lian-qun ZHOU, Jia YAO. Optimal order polynomial motion profile for high-precision flexible scanning platform[J]. Optics and Precision Engineering, 2021, 29(10): 2400

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    Paper Information

    Category: Micro/Nano Technology and Fine Mechanics

    Received: Mar. 2, 2021

    Accepted: --

    Published Online: Nov. 23, 2021

    The Author Email: ZHOU Lian-qun (zhoulq@sibet.ac.cn), YAO Jia (yaojia@sibet.ac.cn)

    DOI:10.37188/OPE.2021.0099

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