Fig. 1. Trapezoidal motion profile

Fig. 2. Third order polynomial motion profile

Fig. 3. Fourth order polynomial motion profile

Fig. 4. Simplified model of flexible structure

Fig. 5. （a）Simulation results of residual vibration； （b） Ts₃，Ts₂，Ts₁： settling time of fourth， fifth and sixth order polynomial motion profile； （c） Ts₄： settling time of third order polynomial motion profile； （d） Ts₅： settling time of trapezoidal motion profile

Fig. 6. （a）Relationship between simulation results of residual vibration and segments of curve； （b） Relationship between simulation results of settling time and segments of curve

Fig. 7. Experiment setup of flexible scanning platform

Fig. 8. Results of residual vibration

Fig. 9. [in Chinese]

Fig. 10. [in Chinese]