Infrared and Laser Engineering, Volume. 44, Issue 3, 951(2015)
Mesa etching process for InAs/GaSb SLs grown by MBE
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Yao Guansheng, Zhang Lixue, Zhang Xiangfeng, Zhang Liang, Zhang Lei. Mesa etching process for InAs/GaSb SLs grown by MBE[J]. Infrared and Laser Engineering, 2015, 44(3): 951
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