Optics and Precision Engineering, Volume. 28, Issue 10, 2252(2020)
Three-dimensional coordinate measurement of microstructures based on nano measuring machine
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WU Jun-jie, LI Yuan. Three-dimensional coordinate measurement of microstructures based on nano measuring machine[J]. Optics and Precision Engineering, 2020, 28(10): 2252
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Received: Apr. 7, 2020
Accepted: --
Published Online: Nov. 25, 2020
The Author Email: Jun-jie WU (wujunjie@simt.com.cn)
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