Acta Photonica Sinica, Volume. 49, Issue 8, 0814001(2020)

Depth-micro Laser Drilling Methods Based on Spatial Light Modulator

Chang SONG1...2, Xiao-jun YANG1, Wei ZHAO1, and Yu-fei DUAN12 |Show fewer author(s)
Author Affiliations
  • 1State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an 710119, China
  • 2University of the Chinese Academy of Sciences, Beijing 100049, China
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    References(9)

    [9] [9] HERMERSCHT A, SVEN K, HAIST T. Holographic optical tweezers with realtime hologram calculation using a phaseonly modulating LCOSbased SLM at 1064 nm[C]. SPIE, 2008, 6905: 690508.https:www.spiedigitallibrary.gconferenceproceedingsofspie69051Holographicopticaltweezerswithrealtimehologramcalculationusinga10.111712.764649.shtSSO=1

    [17] [17] VIADIMIROV F L, PLETNEVA N I, MICHEV I E, et al. Liquid crystal modulats with improved laser damage resistance[C]. Proceedings of SPIE, 1998, 3682: 176182.https:spie.gPublicationsProceedingsPaper10.111712.334788

    [19] [19] GU D, WEN B, MAHAJAN M, et al. High power liquid crystal spatial light modulats[C]. SPIE, 2006, 6306: 630602.https:spie.gPublicationsProceedingsPaper10.111712.683829

    [22] [22] ZHAO Weiwei, LI Xiaowei, XIA Bo, et al. Singlepulse femtosecond laser Bessel beams drilling of highaspectratio microholes based on electron dynamics control[C]. SPIE, 2014, 9296: 9296Q.https:spie.gPublicationsProceedingsPaper10.111712.2073604

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    Chang SONG, Xiao-jun YANG, Wei ZHAO, Yu-fei DUAN. Depth-micro Laser Drilling Methods Based on Spatial Light Modulator[J]. Acta Photonica Sinica, 2020, 49(8): 0814001

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Apr. 9, 2020

    Accepted: May. 21, 2020

    Published Online: Nov. 27, 2020

    The Author Email:

    DOI:10.3788/gzxb20204908.0814001

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