Acta Photonica Sinica, Volume. 49, Issue 8, 0814001(2020)

Depth-micro Laser Drilling Methods Based on Spatial Light Modulator

Chang SONG1...2, Xiao-jun YANG1, Wei ZHAO1, and Yu-fei DUAN12 |Show fewer author(s)
Author Affiliations
  • 1State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an 710119, China
  • 2University of the Chinese Academy of Sciences, Beijing 100049, China
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    Figures & Tables(8)
    Schematics of microhole machining system based on SLM
    Focal spot size when the focus is moved to different position
    Phase diagram of Fresnel lens (unit:m)
    Surface of intensity distribution when the focus is moved to different position
    Micromachining on the sample
    Micromachining on the sample(2 mm)
    Micromachining on the sample (3 mm)
    • Table 1. The influence of the change of focal position on the radius of the focal spot and the focal length of the Fresnel lens

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      Table 1. The influence of the change of focal position on the radius of the focal spot and the focal length of the Fresnel lens

      Δz/μm-1 000-900-800-700-600-500-400-300-200-100
      f/m22.224.727.831.8437.244.755.9574.7112.2224.7
      Δz/μm1002003004005006007008009001 000
      f/m-225.3-112.8-75.3-56.55-45.3-37.8-32.4-28.4-25.3-22.8
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    Chang SONG, Xiao-jun YANG, Wei ZHAO, Yu-fei DUAN. Depth-micro Laser Drilling Methods Based on Spatial Light Modulator[J]. Acta Photonica Sinica, 2020, 49(8): 0814001

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Apr. 9, 2020

    Accepted: May. 21, 2020

    Published Online: Nov. 27, 2020

    The Author Email:

    DOI:10.3788/gzxb20204908.0814001

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