Acta Photonica Sinica, Volume. 49, Issue 8, 0814001(2020)
Depth-micro Laser Drilling Methods Based on Spatial Light Modulator
In the galvo scanning laser drilling systems, the depth of processing is usually limited due to the short focal length. To solve this problem, a method based on high damage threshold spatial light modulator loading Fresnel lens phase is proposed. The focal length of the Fresnel lens is adjusted to change the position of the focus. As the machining depth increases, the focus position moves downward. Then the experiment processing and testing were carried out. The experimental results show that a high quality microhole with a diameter of about 330 microns was machined on stainless steel sample by using the method. The new method uses galvo scanning laser drilling systems and spatial light modulator to process microhole, which has a good application prospect in the field of laser processing.
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Chang SONG, Xiao-jun YANG, Wei ZHAO, Yu-fei DUAN. Depth-micro Laser Drilling Methods Based on Spatial Light Modulator[J]. Acta Photonica Sinica, 2020, 49(8): 0814001
Category: Lasers and Laser Optics
Received: Apr. 9, 2020
Accepted: May. 21, 2020
Published Online: Nov. 27, 2020
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