Infrared and Laser Engineering, Volume. 47, Issue 6, 618002(2018)

Light mode converter in immersion lithography lighting system

Li Meixuan1,2,3、* and Dong Lianhe3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    References(12)

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    [3] [3] Zhang Wei, Gong Yan. Design of diffractive optical elements for off-axis illumination in projection lithography[J]. Opt Precision Eng, 2008, 16(11): 2081-2086. (in Chinese)

    [4] [4] Song Qiang, Zhu Jing, Wang Jian. A mixed gradient algorithm for high performance DOE design in off axis lithography illumination system[J]. Acta Optica Sinica, 2015, 35(1): 0122005. (in Chinese)

    [5] [5] Zhang Wei, Liang Chuanyang, Li Jin, et al. Design of optical elements for beam shaping and unigorm illumination in laser digital projection display system[J]. Acta Optica Sinica, 2015, 35(1): 0805001. (in Chinese)

    [6] [6] Zhao Yang, Gong Yan. Design of beam shaping unit for deep ultraviolet lithographic illumination system [J]. Opt Precision Eng, 2011, 19(1): 29-34. (in Chinese)

    [7] [7] Bao Haiting, Ouyang Mingzhao, Wang Zhiyong, et al. Design of light field shaping system based on DOE identification[J]. Journal of Changchun University of Science and Technology, 2017, 40(2): 27-32. (in Chinese)

    [8] [8] Uzu H, Ichikawa M, Hino M, et al. High efficiency solar cells combining a perovskite and a silicon heterojunction solar cells visa an optical splitting system[J]. Appl Phys Lett, 2015, 106(1): 013506.

    [9] [9] Zhang Jian, Li Mengjuan, Yin Ganghua, et al. Large-diameter membrane Fresnel diffraction elements for space telescope[J]. Optics and Precision Engineering, 2016, 24(6):1289-1296. (in Chinese)

    [10] [10] Zhang Wei, Gong Yan. Vector analysis of diffractive optical elements for off axis illumination of projection lithographic system[J]. Acta Optical Sinica, 2011, 31(10): 1005002. (in Chinese)

    [11] [11] Cui Qingfeng, Gao Shiping, Kuang Yuguang. Design, fabrication and experiment of a hybrid diffractive refractive binary optical system[J]. Optics and Precision Engineering,1997, 5(5): 17-20. (in Chinese)

    [12] [12] Yan Shuhua. Design of Diffractive Mmicro-optics[M]. Beijing: National Defence Industry Press, 2011: 66-76. (in Chinese)

    CLP Journals

    [1] Li Meixuan, Li Hong, Zhang Siqi, Zhang Wenying, Guo Ming. Design of diffractive optical element based on discrete sampling encryption algorithm[J]. Infrared and Laser Engineering, 2019, 48(9): 916004

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    Paper Information

    Category: 光学设计及仿真

    Received: Jan. 10, 2018

    Accepted: Feb. 20, 2018

    Published Online: Sep. 8, 2018

    The Author Email: Meixuan Li (limx@jlenu.edu.cn)

    DOI:10.3788/irla201847.0618002

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