Infrared and Laser Engineering, Volume. 47, Issue 6, 618002(2018)
Light mode converter in immersion lithography lighting system
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Li Meixuan, Dong Lianhe. Light mode converter in immersion lithography lighting system[J]. Infrared and Laser Engineering, 2018, 47(6): 618002
Paper Information
Category: 光学设计及仿真
Received: Jan. 10, 2018
Accepted: Feb. 20, 2018
Published Online: Sep. 8, 2018
The Author Email: Meixuan Li (limx@jlenu.edu.cn)
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