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Optics and Precision Engineering, Volume. 24, Issue 10, 2432(2016)

Design of supper low disturbance torque air bearing table with active compensation

LIU Yan-fang1,*... LIU Xing-fu2, QI Nai-ming1 and ZHANG Liu3 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    LIU Yan-fang, LIU Xing-fu, QI Nai-ming, ZHANG Liu. Design of supper low disturbance torque air bearing table with active compensation[J]. Optics and Precision Engineering, 2016, 24(10): 2432

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    Received: Mar. 25, 2016

    Accepted: --

    Published Online: Nov. 23, 2016

    The Author Email: Yan-fang LIU (lyf04025121@126.com)

    DOI:10.3788/ope.20162410.2432

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology