Researching | Analysis and research of spectral confocal displacement measurement method based on multiple scattering correction

Infrared and Laser Engineering, Volume. 54, Issue 1, 20240407(2025)

Analysis and research of spectral confocal displacement measurement method based on multiple scattering correction

Chunyan LI, Ninglin WANG^*, Jihong LIU, Shaojie WU, Wenwen FU, and Kaili REN

Author Affiliations

School of Electronic Engineering, Xi'an University of Posts & Telecommunications, Xi'an 710121, China

show less

Abstract Get PDF(in Chinese)

Figures&Tables (11)

References (17)

Paper Information

References(17)

[1] A J SCHAIN, R A HILL, J GRUTZENDLER. Label-free in vivo imaging of myelinated axons in health and disease with spectral confocal reflectance microscopy. Nature Medicine, 20, 443-449(2014).

[2] Chao BI, Hongguang LIU, Changyu XU et al. Study on measuring method of tip clearance based on chromatic confocal technology. Aviation Precision Manufacturing Technology, 52, 14-18(2016).

[3] Xiaojun MA, Dangzhong GAO, Mengsheng YANG et al. Measurement of thickness of metal thin film by using chromatic confocal spectral technology. Optics and Precision Engineering, 19, 17-22(2011).

[4] M E FUERST, E CSENCSICS, C HAIDER et al. Confocal chromatic sensor with an actively tilted lens for 3D measurement. JOSA A, 37, B46-B52(2020).

[5] Jianian LIN, Zongyue CHENG, Wenbiao GAN et al. Jitter suppression for resonant galvo based high-throughput laser scanning systems. Optics Express, 28, 26414(2020).

[6] U MINONI, G MANILI, S BETTONI et al. Chromatic confocal setup for displacement measurement using a supercontinuum light source. Optics and Laser Technology, 49, 91-94(2013).

[7] Y QING, Z KUN, Z RUILAN et al. Calibration of a chromatic confocal microscope for measuring a colored specimen. IEEE Photonics Journal, 10, 1-9(2018).

[8] H NOUIRA, N EL-HAYEK, X YUAN et al. Characterization of the main error sources of chromatic confocal probes for dimensional measurement. Measurement Science and Technology, 25, 044011(2014).

[9] J JONKMAN, C M BROWN, G D WRIGHT et al. Tutorial: guidance for quantitative confocal microscopy. Nature Protocols, 15, 1585-1611(2020).

[11] Zhan GAO, Sijin WU, Qiang HAN et al. The influence of surface scattered light to the measurement of laser displacement sensor based on triangulation. Acta Optica Sinica, 28, 29-32(2008).

[12] Qiliang NI, Bo CHEN. Measurement of surface roughness by scattering method. Precision Eng, 9, 151-154(2001).

[13] H DAVIES. The reflection of electromagnetic waves from a rough surface. Proceedings of the IEE - Part IV: Institution Monographs, 101, 209-214(1954).

[14] H BENNETT, J PORTEUS. Relation between surface roughness and specular reflectance at normal incidence. JOSA A, 51, 123-123(1961).

[15] M HIRAKU, S RYO, S YUKI et al. Measurement range expansion of chromatic confocal probe with supercontinuum light source. Ijat, 15, 529-536(2021).

[16] Y MOU, X YOU, D XU et al. Regularized multivariate scatter correction. Chemometrics and Intelligent Laboratory Systems, 132, 168-174(2014).

[17] Chunyan LI, Gengpeng LI, Jihong LIU et al. Analysis and research on spectral confocal displacement measurement method based on GRNN. Acta Photonica Sinica, 51, 0330001(2022).

[18] Chunyan LI, Gengpeng LI, Jihong LIU et al. Influence of eccentricity and tilt of radial GRIN lens on its thickness measurement by chromatic confocal technology. Optical Engineering, 60, 094107(2021).

Tools

Get Citation

Copy Citation Text

Chunyan LI, Ninglin WANG, Jihong LIU, Shaojie WU, Wenwen FU, Kaili REN. Analysis and research of spectral confocal displacement measurement method based on multiple scattering correction[J]. Infrared and Laser Engineering, 2025, 54(1): 20240407

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: 光电测量

Received: Sep. 11, 2024

Accepted: --

Published Online: Feb. 12, 2025

The Author Email: WANG Ninglin (1457331525@qq.com)

DOI:10.3788/IRLA20240407

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology