Infrared and Laser Engineering, Volume. 54, Issue 1, 20240407(2025)
Analysis and research of spectral confocal displacement measurement method based on multiple scattering correction
Figures & Tables(11)
Fig. 1. Schematic diagram of spectral confocal displacement measurement system
Fig. 2. Relationship model of scattering influence on spectral confocal displacement measurement
Fig. 4. Variation of scattered light intensity with incident angle
Fig. 5. Influence of scattering on spectral response of received signal
Fig. 8. Experimental system diagram of spectral confocal displacement measurement
Fig. 9. (a) Direct measurement error; (b) Error after compensation
Table 1. Experimental measurement results
View tableView in ArticleTable 1. Experimental measurement results
Step displacement/μm Theoretical center wavelength/nm Direct measurement of central wavelength/nm Measuring displacement/μm Displacement deviation/μm Corrected displacement error/μm 50 542.5 542.7505 57.9 7.9 0.8 100 544.2 544.4264 108.1 8.1 1.2 150 545.8 545.5656 142.3 -7.7 -0.3 200 547.5 547.7319 207.5 7.5 0.5 250 549.1 549.4746 260.1 10.1 0.6 300 550.8 551.0645 308.2 8.2 0.5 350 552.4 552.7530 359.4 9.4 1.7 400 554.1 554.5036 412.6 12.6 1.9 450 555.7 555.4858 442.5 -7.5 -0.9 500 557.4 557.2829 497.3 -2.7 0.1 550 559.0 559.1449 554.2 4.2 0.6 600 560.6 560.3602 591.4 -8.6 -1.2 650 562.3 562.4897 656.7 6.7 1.5 700 563.9 564.1985 709.2 9.2 1.3 750 565.5 565.8266 759.3 9.3 0.9 800 567.2 567.5237 811.6 11.6 1.4 850 568.8 569.0856 859.8 9.8 0.8 900 570.4 570.1958 894.1 -5.9 -0.3 950 572.0 572.2391 957.3 7.3 0.4 1000 573.6 573.3985 993.2 -6.8 -0.6
Table 2. Comparing experimental measurement results
View tableView in ArticleTable 2. Comparing experimental measurement results
Measure sample roughness/nm Direct measurement maximum error/μm Direct measurement average error/μm Maximum error after correction/μm Corrected average error/μm 12 12.4 7.15 1.5 0.79 50 17.2 10.88 2.1 0.92 100 20.7 15.02 1.1 0.75
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Chunyan LI, Ninglin WANG, Jihong LIU, Shaojie WU, Wenwen FU, Kaili REN. Analysis and research of spectral confocal displacement measurement method based on multiple scattering correction[J]. Infrared and Laser Engineering, 2025, 54(1): 20240407
Paper Information
Category: 光电测量
Received: Sep. 11, 2024
Accepted: --
Published Online: Feb. 12, 2025
The Author Email: WANG Ninglin (1457331525@qq.com)
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