Opto-Electronic Engineering, Volume. 39, Issue 5, 7(2012)
Online Nanomeasurement of Multilayer
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LI Yan-min, LI Meng-chao, LIU Fang-fang, JIN Dan, ZHANG Da-wei, ZHUANG Song-lin. Online Nanomeasurement of Multilayer[J]. Opto-Electronic Engineering, 2012, 39(5): 7
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Received: Nov. 21, 2011
Accepted: --
Published Online: May. 31, 2012
The Author Email: Yan-min LI (llyymm01@tom.com)