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Opto-Electronic Engineering, Volume. 39, Issue 5, 7(2012)

Online Nanomeasurement of Multilayer

LI Yan-min1,*... LI Meng-chao1, LIU Fang-fang2, JIN Dan1, ZHANG Da-wei1 and ZHUANG Song-lin1 |Show fewer author(s)
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    LI Yan-min, LI Meng-chao, LIU Fang-fang, JIN Dan, ZHANG Da-wei, ZHUANG Song-lin. Online Nanomeasurement of Multilayer[J]. Opto-Electronic Engineering, 2012, 39(5): 7

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    Received: Nov. 21, 2011

    Accepted: --

    Published Online: May. 31, 2012

    The Author Email: Yan-min LI (llyymm01@tom.com)

    DOI:10.3969/j.issn.1003-501x.2012.05.002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology