Chinese Journal of Quantum Electronics, Volume. 32, Issue 4, 431(2015)

Design of temperature control system of excimer laser

Mingqing HU1...2,*, Xiaoquan HAN2, Yi ZHOU2, Zebin FENG2, Weihu ZHOU1,2 and Lujun BAI2 |Show fewer author(s)
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    References(4)

    [1] [1] Richard C, Robert A, Dmitry Berger, et al. Gas discharge laser with gas temperature control[P]. 2000.

    [2] [2] Hattori, Osamu, Nikon Corporation. Laser beam control for an exposure apparatus[P]. 2004.

    [9] [9] Hao Yuxiang, Yang Xiaoping, et al. An improved expert intelligent PID algorithm in AQM network[C]. Computer, Mechatronics, Control and Electronic Engineering (CMCE), 2010, 234.

    [11] [11] Xia Anjun, Xu Hao, Hu Shuju, et al. Pitch control of large scale wind turbine based on expert PID control[C]. Electronics, Communications and Control (ICECC), 2011 International Conference on IEEE[M]. 2011: 3836-3839.

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    HU Mingqing, HAN Xiaoquan, ZHOU Yi, FENG Zebin, ZHOU Weihu, BAI Lujun. Design of temperature control system of excimer laser[J]. Chinese Journal of Quantum Electronics, 2015, 32(4): 431

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    Paper Information

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    Received: Sep. 28, 2014

    Accepted: --

    Published Online: Nov. 30, 2015

    The Author Email: Mingqing HU (guyue@mail.hfut.edu.cn)

    DOI:10.3969/j.issn.1007-5461.2015.04.008

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