Chinese Journal of Quantum Electronics, Volume. 32, Issue 4, 431(2015)
Design of temperature control system of excimer laser
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HU Mingqing, HAN Xiaoquan, ZHOU Yi, FENG Zebin, ZHOU Weihu, BAI Lujun. Design of temperature control system of excimer laser[J]. Chinese Journal of Quantum Electronics, 2015, 32(4): 431
Paper Information
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Received: Sep. 28, 2014
Accepted: --
Published Online: Nov. 30, 2015
The Author Email: Mingqing HU (guyue@mail.hfut.edu.cn)
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