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Chinese Journal of Quantum Electronics, Volume. 32, Issue 4, 431(2015)

Design of temperature control system of excimer laser

Mingqing HU1...2,*, Xiaoquan HAN2, Yi ZHOU2, Zebin FENG2, Weihu ZHOU1,2 and Lujun BAI2 |Show fewer author(s)
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    HU Mingqing, HAN Xiaoquan, ZHOU Yi, FENG Zebin, ZHOU Weihu, BAI Lujun. Design of temperature control system of excimer laser[J]. Chinese Journal of Quantum Electronics, 2015, 32(4): 431

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    Received: Sep. 28, 2014

    Accepted: --

    Published Online: Nov. 30, 2015

    The Author Email: Mingqing HU (guyue@mail.hfut.edu.cn)

    DOI:10.3969/j.issn.1007-5461.2015.04.008

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology