Fig. 1. Experimental setup for the EUV emission and debris from laser produced Bi plasma

Fig. 2. Laser produce Bi plasma EUV emission, (a) The EUV emission spectra of laser produce Bi plasma with different laser power densities; (b) the intensity of EUV emission with a wavelength of 11.8 and 12.5 nm dependence on laser power density

Fig. 3. Normalized to the maximum intensity in 11.8 nm based on figure 2(a) with different laser power density

Fig. 4. The intensity of EUV emission with a wavelength of 11.8 and 12.5 nm dependence on laser power density

Fig. 5. Dual laser produce Bi plasma EUV emission, (a) The EUV emission spectral of laser produce Bi plasma with pre-pulse laser energy; (b) the intensity of EUV emission with a wavelength of 11.8 and 12.5 nm dependence on pre-pulse laser energy

Fig. 6. Typical time of fly profiles of Bi ions with the angles of 18°, 36°, 54°and 72° respects to target normal

Fig. 7. The characteristics of debris emission(a) The delay time of ion peak; (b)the distribution of ions kinetic energy with the angles of 18°, 36°, 54°and 72° respect to target normal under the different laser energy